Manufacturing method of fluid control device
A technology of a fluid control device and a manufacturing method, which is applied to parts of pumping devices for elastic fluids, liquid variable displacement machines, liquid fuel engines, etc., and can solve problems such as difficult positioning errors, noise, and difficult maintenance
Active Publication Date: 2018-03-13
MICROJET TECH
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Problems solved by technology
[0006] The main purpose of this case is to solve the problem that in the known fluid control device, due to the miniaturized design of the components, the substrate and the piezoelectric actuator are difficult to accurately position during assembly and cause errors, making it difficult to maintain the gap after assembly. distance, which in turn leads to low efficiency of fluid delivery and noise generation, resulting in inconvenience and discomfort in use
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[0028] Some typical embodiments embodying the features and advantages of the present application will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are used as illustrations in nature, rather than construed to limit this case.
[0029] The manufacturing method of the fluid control device in this case is such that the manufactured fluid control device 2 can be applied to industries such as medical biotechnology, energy, computer technology or printing, so as to transmit fluid, but not limited thereto. see figure 2 and Figure 3A , figure 2 It is a schematic flow chart of the manufacturing method of the fluid control device in the preferred embodiment of the present case, Figure 3A It is a schematic cross-sectional structure diagram of the fluid control device of this...
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The invention discloses a manufacturing method of a fluid control device. The manufacturing method comprises the steps that a, a shell, a piezoelectric actuator and a deformable base structure are provided, wherein the piezoelectric actuator is composed of a piezoelectric element and a vibration plate, the vibration plate is provided with a first surface and a second surface corresponding to the first surface, the second surface is provided with a protrusion portion, the deformable base structure comprises a circulation plate and a flexible plate, and the flexible plate is provided with a movable portion; b, the flexible plate and the circulation plate of the deformable base structure are mutually stacked and connected to subjected to precast synchronous deformation operation so as to be synchronously deformed to form a preformed synchronous deformation structure; and c, the shell, the piezoelectric actuator and the deformable base structure are mutually stacked, positioned and connected in sequence, wherein the preformed synchronous deformation structure of the deformable base structure is the protrusion portion relative to the vibration plate, and therefore the specific depth isdefined between the movable portion and the protrusion portion.
Description
【Technical field】 [0001] This case is about a method for manufacturing a fluid control device, especially a method for manufacturing a fluid control device with a deformable base. 【Background technique】 [0002] At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery structures included in products such as micropumps, sprayers, inkjet heads, and industrial printing devices As its key technology, how to break through its technical bottleneck through innovative structure is an important content of development. [0003] see Figure 1A and Figure 1B as shown, Figure 1A It is a partial structural schematic diagram of a known fluid control device, Figure 1B An offset schematic diagram of a partial structure assembly of a known fluid control device. As shown in the figure, the operating core of the known fluid control device...
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Login to View More IPC IPC(8): F04B43/04F04B53/22
CPCF04B43/046F04B53/22
Inventor 韩永隆黄启峰
Owner MICROJET TECH