Measuring method, screening method, and measuring device for electrical characteristics of electronic component device
A technology of electronic components and electrical characteristics, which is applied in the field of electrical characteristic measurement, screening and measurement devices of electronic component devices, and can solve the problems of maintaining the same temperature and measuring the temperature difficultly
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no. 1 Embodiment approach
[0072] Figure 1 to Figure 3 (A) , (B) shows the electrical characteristic measuring device 100 used in this embodiment. in, figure 1 is a plan view of the electrical characteristic measuring device 100 . figure 2 It is a plan view of main parts of the electrical characteristic measuring device 100 . 3(A), (B) are cross-sectional views of main parts of the electrical characteristic measuring device 100, respectively, and FIG. 3(A) shows figure 1 , figure 2 The Y-Y part of Fig. 3(B) shows figure 1 , figure 2 The Z-Z section.
[0073] In this embodiment, the electronic component device X to be measured is set as an NTC thermistor, and the resistance value is measured as an electrical characteristic. However, the type of electronic component device to be measured is arbitrary, not limited to NTC thermistors, but also PTC thermistors, fixed resistors, capacitors, inductors, platinum temperature measuring resistors, and other electronic components that change electrical c...
no. 2 Embodiment approach
[0158] Figure 6 The electrical characteristic measurement device 200 used in this embodiment is shown. in, Figure 6 It is a plan view of main parts of the electrical characteristic measuring device 200 .
[0159] The electrical characteristic measuring device 200 is a simplified version of the electrical characteristic measuring device 100 used in the first embodiment. That is, electrical characteristic measuring device 100 has two measuring points of measuring point 7P and measuring point 7Q, while electrical characteristic measuring device 200 omits measuring point 7Q and has only measuring point 7P.
[0160] The electrical characteristic measuring device 200 omits the temperature zone 3T, the Peltier element 5b, the measuring terminals 15a, 15b, 16a, 16b, the contact member 14, the measuring terminal driving mechanism 17, and the third temperature sensor 9 included in the electrical characteristic measuring device 100. .
[0161] Using the electrical characteristic me...
no. 3 Embodiment approach
[0163] In the third embodiment, the electrical characteristic measurement device 200 used in the second embodiment is used. However, in the third embodiment, by a method different from that of the second embodiment, the estimated temperature Tx at the time of measurement of the electronic component device X to be measured is obtained, and the measurement error caused by the deviation between the reference temperature Tw and the measurement temperature To is corrected. . In addition, the third embodiment uses Figure 6 Be explained.
[0164] In the above-mentioned first and second embodiments, the estimated temperature Tx at the time of measurement of the first electronic component device X to be measured is obtained by (Equation 1), and the reference temperature Tw and the measurement temperature To are corrected by (Equation 2). The measurement error caused by the deviation. In the third embodiment, instead of using (Formula 1) and (Formula 2), the following (Table 1) is u...
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