A Method for Accurately Testing Small Resistors in Integrated Circuits

Abstract

The invention provides a method for precisely testing small resistance of an integrated circuit. The method comprises the following basic modules: a calibration execution module, a calibration resultanalysis processing module, a test execution module and a test result analysis processing module. Based on the above modules, the method executes the following operations of: configuring a circuit toa calibration circuit, and setting related parameters for a parameter measurement unit of ATE; executing a calibration operation, and calculating a calibration reference value; configuring a circuit into a precise test circuit, and setting test conditions; and executing a test operation, and revising a test result by using the calculated calibration value. The method is implemented by a parametermeasurement unit of the automatic test equipment, can complete high-precision small-resistance test, effectively corrects measurement errors caused by a peripheral circuit and connection conditions, effectively compensates errors caused by the external environment, and can improve the bottom noise of the ATE; and the method provided by the invention can be adapted to ATE various measurement unitsof different test equipment to execute the small resistance test, and is wide in application range.

Description

technical field [0001] The invention relates to the field of integrated circuit testing, in particular to a method for accurately testing small resistors in integrated circuits. Background technique [0002] Integrated circuit testing is the process of detecting integrated circuits or modules. By measuring the output response of integrated circuits and comparing the expected output, the process of determining or evaluating the functions and performance of integrated circuit components is the process of verifying design, monitoring production, ensuring quality, and analyzing Invalidation and an important means of guiding application. [0003] The test process of integrated circuits requires the use of testers, usually called automatic test equipment (AutomaticTest Equipment, ATE), and ATE resources need to use a series of peripheral circuits and hardware to assist, these peripheral hardware and circuits include: test load board, Test adapter board, probe card, test socket, e...

AI Technical Summary

Problems solved by technology

However, when these peripheral hardware and circuits make the ATE channel and the test product form a physical electrical connection, they inevitably bring in contact resistance and introduce a long electrical connection channel at each contact interface.

The contact resistance brought in will seriously affect the test of the small resistance value of the actual product, and even cause the contact resistance of the entire electrical circuit to be much greater than the resistance value of the product

[0004] In addition, long electrical connection channels are more susceptible to external electromagnetic coupling effects and cause test instability

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