The application relates to the technical field of
radio frequency microwave devices, in particular to a W-waveband wide-frequency RF MEMS multi-blade multi-pole switch which comprises a
silicon substrate, a plurality of input / output ports and a MEMS
cantilever beam switch unit, the MEMS
cantilever beam switch unit is provided with a driving
electrode, and the communication and disconnection of the
radio frequency signal path between the corresponding input port and the output port can be controlled by applying
voltage to the driving
electrode. The application realizes the on-off of the
radio frequency signal path by electrostatic driving control of the deformation of the
cantilever beam, and the
driving mode has the advantages of low
power consumption, high speed and easy integration. Compared with the common single-blade structure, the application can realize more complex
signal routing in a compact unit, improves the
system integration and functional flexibility, realizes interference-free crossing by using the slot structure through the horizontal swing type structure and the vertical lifting type structure, significantly reduces the high-frequency parasitic effect, and ensures the
transmission quality of the
millimeter wave signal in the W waveband.