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Method for performing multi-parameter synchronous measurement by means of Kelvin probe force microscope

A Kelvin probe force and simultaneous measurement technology, which is applied in the measurement of mechanical properties and surface local potential, and the field of surface topography. problems, to achieve high practical value, high availability and operability, and to compensate for errors

Active Publication Date: 2017-06-13
HARBIN INST OF TECH
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Although the existing methods can realize the characterization of the surface morphology, mechanical properties and surface local potential of the sample, they cannot realize the simultaneous characterization of these parameters, that is to say, the surface morphology, mechanical properties and local surface potential of the sample cannot be simultaneously obtained through one scan. electric potential

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  • Method for performing multi-parameter synchronous measurement by means of Kelvin probe force microscope
  • Method for performing multi-parameter synchronous measurement by means of Kelvin probe force microscope
  • Method for performing multi-parameter synchronous measurement by means of Kelvin probe force microscope

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specific Embodiment approach 1

[0039] Specific implementation mode one: combine figure 1 Describe this embodiment, the method for multi-parameter synchronous measurement using a Kelvin probe force microscope described in this embodiment, wherein the Kelvin probe force microscope includes an XY micro-positioning stage 12, an XYZ nano-positioning stage 13, and a Kelvin scanning sample stage 15 , XYZ micron positioning table 8, one-dimensional large-scale adjustment micro-platform 10, probe hand bracket 9, probe hand 7, host computer, DC power supply, arbitrary wave generator, acquisition card, signal generator, phase shifter, lock phase amplifier, four-quadrant position detector, semiconductor laser generator, piezoelectric controller No. 1, piezoelectric controller No. 2 and piezoelectric controller No. 3;

[0040] The Kelvin scanning sample stage 15 is fixed on the XYZ nanopositioning stage 13, and the XYZ nanopositioning stage 13 is fixed on the XY micron positioning stage 12; the probe hand 7 is equipped ...

specific Embodiment approach 2

[0084] Specific implementation mode two: combination figure 1 and figure 2 This embodiment is described. This embodiment is a further limitation of the method described in Embodiment 1. In this embodiment, a measurement module implemented by software is embedded in the host computer, and the measurement module includes the following units:

[0085] Force detection unit: collect the deformation of the conductive probe 7-4 detected by the four-quadrant position detector 4 in real time, and calculate the force between the conductive probe 7-4 and the sample according to the deformation; the force is equal to The product of the deformation amount and the stiffness of the conductive probe 7-4;

[0086] Surface topography and maximum indentation depth measurement unit: Control the Kelvin scanning sample stage 15 to rise through the No. 1 piezoelectric controller, so that the sample is close to the conductive probe 7-4, when the maximum interaction between the conductive probe 7-4 ...

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Abstract

A method for performing multi-parameter synchronous measurement by means of a Kelvin probe force microscope relates to measurement technology for surface topography, mechanical property and local surface potential. The method aims to settle a problem of incapability of realizing synchronous representation of the surface topography, the mechanical property and the local surface potential of a sample through a traditional Kelvin probe force microscope. Vertical reciprocation of a conductive probe is kept always; and in one motion period, when a maximal interaction force between the conductive force and the sample reaches a preset value, a corresponding time point is B, and a surface topography image is measured at the point B. When the conductive probe is separated from the surface of the sample, the corresponding time point is C, and an equivalent Young's modulus image is obtained between the point B and the point C by means of a DMT model. After the conductive probe is separated from the sample, the conductive probe continuously rises to a preset height and is kept for a certain time period, and the surface potential difference between the conductive probe and the sample is measured in the time period. The method provided by the invention is suitable for measuring the surface topography, the mechanical property and the local surface potential of the sample.

Description

technical field [0001] The invention relates to the measurement technology of surface topography, mechanical properties and surface local potential. Background technique [0002] Kelvin Probe Force Microscopy (KPFM) is a member of the Scanning Probe Microscopy (SPM) family, which combines Kelvin probe technology with Atomic force microscopy (AFM) to achieve Characterization of the local potential on the sample surface. The traditional Kelvin probe force microscope can realize the characterization of the surface morphology, mechanical properties and surface local potential of the sample through different measurement methods. For example, the "lift-up mode" can obtain the surface topography and local potential of the sample through two scans, and the "resonance mode (tapping mode)" can obtain the surface topography and local potential of the sample at the same time through one scan. The "peak force mode" is an intermittent contact mode. When scanning, two scans are performed...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/30G01Q60/28G01Q60/24
CPCG01Q60/24G01Q60/28G01Q60/30
Inventor 谢晖张号孟祥和宋健民
Owner HARBIN INST OF TECH
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