Time-dependent Error Compensation Method of Grating Dynamic Measurement in Variable-speed Motion
A technology of dynamic measurement and variable-speed motion, applied in measurement devices, complex mathematical operations, and optical devices, etc., can solve problems such as no discrimination, cumbersome and complicated, and achieve the effect of ensuring dynamic measurement accuracy.
Active Publication Date: 2019-05-10
CHINA JILIANG UNIV
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However, this kind of method does not distinguish and analyze the error sources of dynamic measurement, and when the motion state of the grating is constantly changing, it is necessary to collect a large amount of error data in each state to ensure the reliability of the model, which is very cumbersome and complicated
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[0020] The present invention will be further described below in conjunction with accompanying drawing.
[0021] figure 1 is the grating output moiré signal u(t) and the measured signal u after circuit processing m (t) Schematic diagram of phase correspondence. Where φ(t) is the grating output signal phase, φ m (t) is the measurement signal phase, Δφ(t) is the phase deviation between the measurement signal and the output signal, which is called aging error. After the moiré signal u(t) output by the grating is processed by analog and digital circuits, due to the influence of delay and phase shift, the measurement signal u m (t) The phase lags behind the output signal of the grating, so that the measured value cannot represent the dynamic position of the grating in real time, which introduces a time-sensitive error for the dynamic measurement of the grating.
[0022] figure 2 are schematic diagrams of the respective timing error sources for analog and digital circuits. Tim...
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The invention discloses a time error compensation method for grating dynamic measurement in the process of variable speed movement. The invention comprises the following steps: real-time calculation of the n-order differential of the phase measurement value of the grating moiré signal with respect to time to obtain the real-time frequency of the signal; off-line calibration of the phase shift error of the analog circuit at different signal frequencies; off-line calibration of the grating moiré signal through the analog circuit It consumes time and calculates the processing time of digital circuit algorithms, and calculates the delay error in the process of grating variable speed movement through the Taylor model in real time; according to the real-time frequency of the signal look-up table to obtain the value of the corresponding phase shift error, combined with the delay error into the aging error; the aging The error is converted proportionally to the grating measurement error compensation into the grating measurement value. The invention uses the aging error to represent the overall influence of the phase shift error and the delay error in the dynamic measurement of the grating during the variable speed movement, and proposes an error compensation method that can meet complex motion conditions such as variable speed and variable acceleration, so as to improve the dynamic measurement accuracy of the grating.
Description
technical field [0001] The invention relates to the field of grating dynamic measurement, in particular to a time error compensation method for grating dynamic measurement in variable speed motion. Background technique [0002] With the rapid development of science and technology, dynamic measurement gradually occupies a dominant position in the field of testing technology. Compared with static measurement, due to the late start and higher complexity of dynamic measurement, its theoretical system is not perfect, and there is still a lack of systematic understanding of various error sources in dynamic measurement. At the same time, the requirements for dynamic measurement accuracy are constantly increasing due to industrial development, and dynamic measurement error compensation technology has become the focus of research. [0003] Grating is an important means to achieve dynamic measurement, but due to the introduction of fixed time delay due to the sensor response time, ca...
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IPC IPC(8): G06F17/50G06F17/13G01B11/00
CPCG01B11/00G06F17/13G06F30/20
Inventor 朱维斌王辛叶树亮
Owner CHINA JILIANG UNIV