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Method for compensating time delay error of dynamic measurement of optical grating in variable speed motion

A technology of time-delay error and variable speed movement, which is applied in the field of grating dynamic measurement, can solve the problems of rate introduction error, difficulty in ensuring uniform motion of grating, etc., and achieve the effect of ensuring dynamic measurement accuracy

Active Publication Date: 2018-03-27
CHINA JILIANG UNIV
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Problems solved by technology

However, it is difficult to ensure that the grating moves at a constant speed for a long time in actual measurement. Under complex motion conditions such as variable speed and variable acceleration, the "speed-induced error" cannot represent the delay error.

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  • Method for compensating time delay error of dynamic measurement of optical grating in variable speed motion
  • Method for compensating time delay error of dynamic measurement of optical grating in variable speed motion
  • Method for compensating time delay error of dynamic measurement of optical grating in variable speed motion

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Embodiment Construction

[0019] The present invention will be further described below in conjunction with accompanying drawing.

[0020] Picture 1-1 It is a schematic diagram of the delay error caused by factors such as signal processing time in the process of circular grating dynamic angle measurement. Among them, O is the rotation axis of the grating; A is the angular position of the grating when the measurement occurs; B is the angular position of the grating when the measured value is output; When the grating rotates to the angular position A, the angle measurement signal at A starts to be transmitted to the subsequent signal processing circuit. After a period of signal processing time, the angle measurement value at A is output, and the grating also rotates from A to B by ΔP(t) place.

[0021] Apparently, the acquired angle measurement value at A does not correspond to the actual angular position B of the grating at this moment, because the delay introduced by the signal processing time brings ...

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Abstract

The invention discloses a method for compensating the time delay error of the dynamic measurement of an optical grating in variable speed motion. The method of the present invention includes the following steps that: time for optical grating moire signals to pass a hardware circuit is calibrated offline; the processing time of an optical grating moire software algorithm is calculated; the n-th order differential quantity of an optical grating measurement value for the time is calculated in real time; the Taylor model is adopted to quantify time delay error of the optical grating in the variable speed motion; and a time delay error-compensated optical grating dynamic measurement value is outputted. According to the method of the invention, the multi-order differentials of the optical grating measurement value are adopted to characterize the dynamic measurement error of the optical grating in the variable speed motion caused by the time delay of the signals; the time delay error compensation method which can meet complex motion conditions such as variable speed and variable acceleration conditions is proposed; and the dynamic measurement accuracy of the optical grating can be improved.

Description

technical field [0001] The invention relates to the field of grating dynamic measurement, in particular to a method for compensating the time delay error of grating dynamic measurement during variable-speed motion. Background technique [0002] Grating measurement technology has always been an important part of the measurement field. Different from traditional static measurement, the characteristics of dynamic measurement determine the complexity of its accuracy evaluation and value processing methods. With the development of technology and the improvement of practical application requirements, the requirements for real-time acquisition of grating dynamic measurement values ​​are also getting higher and higher. [0003] The most essential difference between grating dynamic measurement and static measurement is that the dynamic measurement output value needs to have a one-to-one correspondence with time. However, in dynamic measurement, due to signal processing and other re...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D3/028
CPCG01D3/028
Inventor 朱维斌王辛叶树亮
Owner CHINA JILIANG UNIV