Compensation method for grating dynamic measurement delay error in variable speed motion
A technology of time-delay error and variable-speed motion, applied in the field of grating dynamic measurement, can solve problems such as rate-induced error, difficulty in ensuring uniform motion of grating, and achieve the effect of ensuring dynamic measurement accuracy
Active Publication Date: 2019-04-05
CHINA JILIANG UNIV
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Problems solved by technology
However, it is difficult to ensure that the grating moves at a constant speed for a long time in actual measurement. Under complex motion conditions such as variable speed and variable acceleration, the "speed-induced error" cannot represent the delay error.
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[0019] The present invention will be further described below in conjunction with accompanying drawing.
[0020] Picture 1-1 It is a schematic diagram of the delay error caused by factors such as signal processing time in the process of circular grating dynamic angle measurement. Among them, O is the rotation axis of the grating; A is the angular position of the grating when the measurement occurs; B is the angular position of the grating when the measured value is output; When the grating rotates to the angular position A, the angle measurement signal at A starts to be transmitted to the subsequent signal processing circuit. After a period of signal processing time, the angle measurement value at A is output, and the grating also rotates from A to B by ΔP(t) place.
[0021] Apparently, the acquired angle measurement value at A does not correspond to the actual angular position B of the grating at this moment, because the delay introduced by the signal processing time brings ...
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The invention discloses a compensating method for the delay error of grating dynamic measurement in the process of variable speed movement. The invention comprises the following steps: off-line calibration of the grating Moiré signal time spent passing through the hardware circuit; calculation of the grating Moiré signal software algorithm processing time; real-time calculation of the nth order differential of the grating measurement value against time; quantifying the grating variable speed movement process through the Taylor model Delay error in; output the dynamic measurement value of the grating after delay error compensation. The invention uses the multi-order differential of the grating measurement value to represent the dynamic measurement error of the grating caused by the signal delay during the variable speed movement, and proposes a delay error compensation method that can meet complex motion conditions such as variable speed and variable acceleration to improve the grating. Dynamic measurement accuracy.
Description
technical field [0001] The invention relates to the field of grating dynamic measurement, in particular to a method for compensating the time delay error of grating dynamic measurement during variable-speed motion. Background technique [0002] Grating measurement technology has always been an important part of the measurement field. Different from traditional static measurement, the characteristics of dynamic measurement determine the complexity of its accuracy evaluation and value processing methods. With the development of technology and the improvement of practical application requirements, the requirements for real-time acquisition of grating dynamic measurement values are also getting higher and higher. [0003] The most essential difference between grating dynamic measurement and static measurement is that the dynamic measurement output value needs to have a one-to-one correspondence with time. However, in dynamic measurement, due to signal processing and other re...
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IPC IPC(8): G01D3/028
CPCG01D3/028
Inventor 朱维斌王辛叶树亮
Owner CHINA JILIANG UNIV