Array substrate, display panel, display device, and manufacturing method
An array substrate and display panel technology is applied in the fields of array substrates, display devices and their preparation, and display panels, and can solve problems such as difficulty in cleaning, lowering product yield, and damage to device film performance.
Active Publication Date: 2021-01-22
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0002] In the prior art, the display device that people use in daily life is more widely TFT-LCD, wherein in the preparation process of the substrate, there are via holes for connection in the film layer of the substrate, and during the preparation process of the film layer on the substrate , after the ITO on the via hole is formed, during the preparation process of the ITO layer, it is easy for dust and impurities to enter the via hole, which is difficult to remove. The metal Mo, Al, Nd, etc. of the drain layer are in contact, and electrochemical corrosion will occur, resulting in damage to the performance of the device film layer and reducing the yield of the product
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[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0031] Please refer to Figure 1g An array substrate provided by an embodiment of the present invention includes a gate layer 2, a gate insulating layer 3, a source-drain layer 4, a first passivation layer 5, and an ITO layer 6 sequentially formed on a substrate 1, and is arranged on the second A first via hole in the passivation layer 5 and a second via hole located in the gate insulating layer 3; a second passivation layer 7, wherein a part of the second pas...
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The invention relates to the field of display technology, and discloses an array substrate, a display panel, a display device and a preparation method. The array substrate includes a gate layer, a gate insulating layer, a source-drain layer, a first passivation layer, an ITO layer, including: a first via hole provided in the first passivation layer and a second via hole provided in the gate insulating layer; a second passivation layer, wherein a part of the second passivation layer Located in the first via hole and the second via hole, so as to cover the portion of the ITO layer located in the first via hole and the second via hole. In the above-mentioned array substrate, the second passivation layer on the ITO layer in the first via hole and the second via hole can protect the ITO layer in the first via hole and the second via hole and the underlying metal in the subsequent preparation process. The layer plays a protective role, preventing the ITO layer in the first via hole and the second via hole from contacting with dust, impurities, water vapor, etc., preventing water vapor from penetrating the ITO layer and contacting the metal layer under the ITO layer, cutting off the source of corrosion, and avoiding ITO layers and metal layers are corroded, improving product yield.
Description
technical field [0001] The invention relates to the field of display technology, in particular to an array substrate, a display panel, a display device and a preparation method. Background technique [0002] In the prior art, the display device that people use in daily life is more widely TFT-LCD, wherein in the preparation process of the substrate, there are via holes for connection in the film layer of the substrate, and during the preparation process of the film layer on the substrate , after the ITO on the via hole is formed, during the preparation process of the ITO layer, it is easy for dust and impurities to enter the via hole, which is difficult to remove. Metal Mo, Al, Nd, etc. in the drain layer are in contact, and electrochemical corrosion will occur, resulting in damage to the performance of the device film layer and reducing the yield of the product. Contents of the invention [0003] The invention provides an array substrate, a display panel, a display devic...
Claims
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IPC IPC(8): H01L27/12H01L27/02
CPCH01L27/02H01L27/12H01L27/1259H01L27/124H01L27/1288H01L27/1248G02F1/136227G02F1/136236G02F1/133345G02F1/136286G02F1/1368
Inventor 庞冬杨小飞秦冬杰刘旭张正东郭明周
Owner BOE TECH GRP CO LTD