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A laser heterodyne interferometry device and method based on corner cube reflection

A laser heterodyne interference and measuring device technology, applied in measuring devices, optical devices, instruments, etc., can solve the problems of optical thermal drift, difficult optical path alignment, etc., and achieves suppression of nonlinear errors, simple adjustment of optical path alignment, The effect of less optical thermal drift

Active Publication Date: 2019-08-20
NAT INST OF METROLOGY CHINA
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Problems solved by technology

[0006] In view of the problems existing in the above-mentioned prior art, the present invention proposes a laser heterodyne interferometry device and method based on corner cube reflection, which solves the problems of difficult optical path alignment and easy optical thermal drift in laser heterodyne interferometry , to improve the accuracy of laser heterodyne interferometry

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  • A laser heterodyne interferometry device and method based on corner cube reflection

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Embodiment 1

[0041] Example 1: Measuring the displacement of the linear guide stage

[0042] (1) Fix the corner cube prism on the stage of the linear guide rail, and move with the linear guide rail;

[0043] (2) set up the interferometric light path of the present invention, select the measured corner cube prism and optical compensating mirror with the same material and refractive index n, if the optical path of the measuring beam in the measured corner cube prism is L, then the optical The thickness of the compensation mirror along the direction of the reference beam is

[0044] (2) Adjust the direction of the two outgoing lights of the laser so that the direction is parallel to the movement direction of the stage;

[0045] (3) Adjust the position and attitude of the corner cube so that the two beams of measuring light are incident into the corner cube;

[0046] (4) adjust the angle of the third polarization beam splitter, plane mirror and measured corner cube, so that the reference b...

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Abstract

The invention relates to a laser heterodyne interference measuring apparatus and method based on pyramid prism reflection. The laser heterodyne interference measuring apparatus based on pyramid prismreflection comprises a double-frequency laser, a first photoelectric receiver, a second photoelectric receiver, a first polarizing beam splitter, a third polarizing beam splitter, a second polarizingbeam splitter, a quarter wave plate, an optical compensation mirror, a plane mirror, and a measured pyramid prism. The laser heterodyne interference measuring method based on pyramid prism reflectionutilizes two space separating incident light beams with different frequency to perform heterodyne interference measurement, and uses the optical compensation mirror to balance the optical paths of themeasured beam and the reference beam. In the laser heterodyne interference measuring method based on pyramid prism reflection, the measured pyramid prism makes reciprocating motion in the propagationdirection of the incident light beams. The laser heterodyne interference measuring method based on pyramid prism reflection suppresses optical nonlinear error and optical thermal drift error in laserheterodyne interference measurement, reduces the difficulty of optical path alignment adjustment, and improves the accuracy of laser heterodyne heterodyne interference measurement.

Description

technical field [0001] The invention belongs to the field of laser interferometry, and mainly relates to a laser heterodyne interferometry device and method based on corner cube reflection. Background technique [0002] The laser heterodyne interferometry method is widely used in ultra-precision geometric parameter measurement, fast ultra-precision positioning, ultra-precision machining and other fields, and its important role in the fields of value traceability and scientific research is becoming increasingly prominent. However, the traditional laser heterodyne interferometry method is difficult to avoid the cross-aliasing between the dual-frequency beams, and then introduces nanometer-scale nonlinear errors. The existence of this error makes it difficult to further improve the measurement accuracy. Although the current heterodyne interferometry method based on the spatial separation of input beams can suppress nonlinear errors, it is difficult to adjust the alignment of th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 白洋鲁云峰李正坤张钟华贺青
Owner NAT INST OF METROLOGY CHINA
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