Semiconductor characteristic parameter comprehensive testing equipment

A technology of characteristic parameters and comprehensive testing, applied in the comprehensive characterization of semiconductor optical, magnetic and their mutual coupling properties, and electrical fields, it can solve problems such as unseen equipment, and achieve the effect of expanding modes and capabilities.

Inactive Publication Date: 2018-11-23
南京雨花智高科教工作坊
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  • Semiconductor characteristic parameter comprehensive testing equipment

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Embodiment Construction

[0017] A comprehensive testing device for semiconductor characteristic parameters, which has independent optical, electrical and magnetic testing functions. The testing device includes a light source 100, an optical detection system (not shown in the drawings), an electrical system (not shown in the drawings), a magnetic Optical system (not marked in the drawings) and control system 121, the optical detection system, electrical system, magnetic system can be connected to the control system 121 through the communication interface, the optical detection system, electrical system, magnetic system any Switching between the two can be realized through the control system 121 . The opto-electromagnetic test modules can be combined at will, and the coupling test can be modulated with each other; normal temperature or variable temperature test can be carried out.

[0018] In this embodiment, the magnetic system adopts a bipolar magnet 105, and the magnetic field strength is adjustable....

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Abstract

The invention provides semiconductor characteristic parameter comprehensive testing equipment, and relates to the field of semiconductor performance testing. The equipment comprises a light source, anoptical detection system, an electrical system, a magnetic system, and a control system. The optical detection system, the electrical system and the magnetic system can be connected to the control system through communication interfaces. The switching between any two of the optical detection system, the electrical system and the magnetic system can be achieved through the control system. The positive effects of the invention are that the equipment can achieve the independent testing and also can achieve the coupling testing through the organic integration of the independent modules, thereby greatly improving the testing mode and capability.

Description

technical field [0001] The present application relates to the field of semiconductor performance testing, in particular to a comprehensive characterization method for semiconductor optical, electrical, magnetic and their mutual coupling properties. Background technique [0002] At present, in the field of semiconductors, optoelectronic technology is developing rapidly. For example, the LED industry contains a new technological revolution, which may establish a new industrial system; in the field of communications, the arrival of the 3G information age, the rapid development of computers and Internet , are inseparable from the rapid development of the semiconductor industry. The development of the semiconductor industry is inseparable from advanced testing technology. [0003] Light, electricity, force, and magnetism are the four basic aspects of material characterization, especially the properties of light, electricity, and magnetism, which are very important parameters f...

Claims

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Application Information

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IPC IPC(8): G01R31/26
CPCG01R31/2603G01R31/2635
Inventor 杜娟花于健涛
Owner 南京雨花智高科教工作坊
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