Apparatus for routing a carrier in a processing system, a system for processing a substrate on the carrier, and method of routing a carrier in a vacuum chamber

A technology of vacuum chamber and processing system, which is applied in the fields of circuits, transportation and packaging, electric solid devices, etc.

Pending Publication Date: 2018-12-07
APPLIED MATERIALS INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This results in a large processing system, the footprint of a large system is a consideration

Method used

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  • Apparatus for routing a carrier in a processing system, a system for processing a substrate on the carrier, and method of routing a carrier in a vacuum chamber
  • Apparatus for routing a carrier in a processing system, a system for processing a substrate on the carrier, and method of routing a carrier in a vacuum chamber
  • Apparatus for routing a carrier in a processing system, a system for processing a substrate on the carrier, and method of routing a carrier in a vacuum chamber

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Embodiment Construction

[0014] Reference will now be made in detail to various embodiments, one or more examples of which are illustrated in the accompanying drawings. In the following description of the drawings, the same reference numerals denote the same components. In general, only differences with respect to individual embodiments are described. Examples are provided by way of illustration and not meant to be limiting. Furthermore, features illustrated or described as part of one embodiment can be used on or in combination with other embodiments to yield still further embodiments. This description is intended to cover such adaptations and variations.

[0015] Embodiments of the present disclosure relate to routing carriers in a processing system. The processing system may be a display manufacturing system, in particular a display manufacturing system for a large area substrate or a carrier corresponding to a large area substrate. The conveying of the carriers through the system may in partic...

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Abstract

An apparatus for routing a carrier in a processing system is described. The apparatus includes a first holding assembly attached to a vacuum chamber for transportation of the carrier along a first direction, a second holding assembly attached to the vacuum chamber for transportation of the carrier along a second direction different from the first direction, and a rotatable support for rotating thecarrier from the first direction to the second direction.

Description

technical field [0001] Embodiments of the invention relate to routing carriers in a processing system, such as routing carriers in a rotary module. Embodiments of the invention relate in particular to an apparatus for routing a carrier in a processing system, a system for processing a substrate on a carrier, and a method of transporting a carrier in a vacuum chamber. Background technique [0002] An organic evaporator is a tool for manufacturing organic light-emitting diodes (OLEDs). OLEDs are a particular type of light-emitting diode in which the emissive layer consists of thin films of specific organic compounds. Organic light-emitting diodes (OLEDs) are used to manufacture television screens, computer monitors, mobile phones and other handheld devices, etc., for displaying information. OLEDs can also be used for general space lighting. The range of possible colors, brightness and viewing angles of an OLED display is greater than that of a conventional LCD display becau...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677
CPCH01L21/67709H01L21/67712H01L21/67715H01L21/02H01L21/67276H01L21/6773H10K71/00H01L21/67721H01L21/67739
Inventor 塞巴斯蒂安·巩特尔·臧奥利弗·海默尔斯蒂芬·班格特
Owner APPLIED MATERIALS INC
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