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A dual-channel grating displacement measurement method

A technology of grating displacement and measurement method, which is applied in measurement devices, optical devices, instruments, etc., and can solve the problems that the accuracy and sensitivity cannot be further improved.

Active Publication Date: 2020-04-28
ZHONGBEI UNIV
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  • Claims
  • Application Information

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Problems solved by technology

[0003] In order to overcome the deficiencies in the prior art, the present invention provides a dual-channel grating displacement measurement method. The existing near-field-based sub-wavelength double-layer grating detection principle only has a single-channel signal, which cannot be passed through fine-grained gratings like moiré fringe detection. Sub-circuits realize high-sensitivity displacement detection, resulting in no further improvement in accuracy and sensitivity

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  • A dual-channel grating displacement measurement method
  • A dual-channel grating displacement measurement method
  • A dual-channel grating displacement measurement method

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Experimental program
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Embodiment 1

[0037] Laser wavelength: λ=0.6328μm;

[0038] Grating constant of subwavelength grating: d=0.8μm;

[0039] The duty cycle is: 0.5;

[0040] The size of the middle opaque grating line area of ​​the lower sub-wavelength grating 4:;

[0041] Double-layer grating distance: h=6.07μm;

[0042] High-power subdivision circuit subdivision multiple: 10000.

[0043] Wherein, the sub-wavelength grating 4 is located in the Talbot image area of ​​the sub-wavelength grating 3 and is an approach area to realize a high-contrast Talbot image, thereby improving displacement sensitivity.

[0044] The first sub-wavelength grating 3 is a conventional grating, the grating constant is d, and the duty ratio is 0.5, and there is an opaque grating line area in the middle of the second sub-wavelength grating 4. k=1, 2, 3..., so the light of the second sub-wavelength grating 4 is divided into two beams of light whose phase is just 90°, the light intensity obtained by the first photodetector 5 and the...

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Abstract

The invention relates to the technical field of high-accuracy displacement measurement, in particular to a double-channel optical grating displacement measurement method. A traditional sub-wavelengthdouble-layer optical grating structure is changed to realize double-channel optical grating displacement sensing of which the difference of two phase positions is 90 degrees, and arc tangent can be combined to realize wide-range whole-range high-accuracy displacement measurement with consistent sensitivity. Since the method can obtain an optical grating structure that the light intensity of one channel is a sine trigonometric function along with displacement, the light intensity of the other channel is a cosine trigonometric function along with displacement and an optical grating constant d isof a sub-wavelength level, a high-power subdivision technology is combined, and therefore, detection of high displacement sensitivity can be realized.

Description

technical field [0001] The invention relates to the technical field of high-precision displacement measurement, and more specifically, relates to a dual-channel grating displacement measurement method. Background technique [0002] With the rapid development of some cutting-edge technologies, in the fields of manufacturing, microelectronics, biology, and aerospace, especially in high-precision gyroscopes and accelerometers, there is an urgent need for high-precision, high-sensitivity displacement measurement systems. Among them, the grating detection method has the advantages of high precision, small size, light weight, etc., and is widely used. There are three main types of grating displacement sensors, one is based on the principle of double grating Moire fringe detection, and the other is based on single grating plus reflection The grating diffraction principle and interference principle of the structure. The single grating structure is applied to the displacement sensor ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张瑞王雅宁李孟委解琨阳王志斌赵宏波
Owner ZHONGBEI UNIV