Refractive displacement sensor and measuring method thereof

Abstract

The invention provides a refractive displacement sensor and a measuring method thereof. The displacement sensor comprises a triangular wave reflector, a laser source, a refractor, a photoelectric detector, and a processing system. The triangular wave reflector comprises at least one reflecting surface which is sequentially distributed along the moving direction; the laser source is used for emitting a laser beam, and the laser beam is incident on one reflecting surface of the triangular wave reflector; the refractor is used for receiving a laser beam reflected by the reflecting surface, and refracting the received laser beam; the photoelectric detector is used for receiving the laser beam refracted by the refractor and measuring the incident position of the laser beam; and the processing system is used for calculating the displacement change value of a detected object according to the incident position change amount of the laser beam received by the photoelectric detector. According tothe refractive displacement sensor and the measuring method thereof, the angle of the laser incident to the photoelectric detector can be reduced while the amplification factor of the displacement sensor is increased by arranging a refractor, so that the measurement precision of the displacement sensor is improved.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a refraction displacement sensor and a measurement method thereof. Background technique [0002] The new principle of displacement measurement based on the optical triangular amplification method is realized on the basis of the optical triangular amplification method, combined with triangular wave optical devices and high-precision PSD (Position Sensitive Device, position sensitive (sensitive) detector). The triangular wave optical device subdivides the linear displacement into equal intervals, reduces the processing accuracy and size requirements of optical devices, and at the same time reduces the size requirements of high-precision PSD, and realizes high-precision displacement measurement in a small range. However, the displacement sensor in the prior art, for example, the application number is 201520393174.9, and the name is the displacement sensor provided in "New Optic...

AI Technical Summary

Problems solved by technology

However, the measurement magnification of the displacement sensor is related to the incident angle of the PSD, and the magnification of the sensor is easily affected, that is, when the incident angle of the laser beam incident on the PSD increases, the measurement accuracy of the PSD itself will decrease.

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