Refractive displacement sensor and measuring method thereof

A technology of displacement sensor and refracting mirror, which is applied in the field of measurement, can solve the problems of sensor magnification influence, PSD measurement accuracy decline, etc., and achieve the effect of increasing magnification, reducing requirements, and improving measurement accuracy

Pending Publication Date: 2018-12-25
BEIFANG UNIV OF NATITIES
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the measurement magnification of the displacement sensor is related to the incident angle of the PSD, and the magnification of the sensor is easily affected, that is, when the incident angle of the laser beam incident on the PSD increases, the measurement accuracy of the PSD itself will decrease.

Method used

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  • Refractive displacement sensor and measuring method thereof
  • Refractive displacement sensor and measuring method thereof
  • Refractive displacement sensor and measuring method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0035] see figure 2 In this embodiment, a refraction displacement sensor is provided, including a laser source 1, a laser beam 2, a triangular wave reflector 3, and the triangular wave reflector 3 includes a reflective surface 31, a refractor 4, a photodetector 5, and a housing 6 .

[0036] In this refraction displacement sensor:

[0037] The laser source 1 emits the laser beam 2, and makes the laser beam 2 shoot to the reflective surface 31 of the triangular wave reflector 3; the refractor 4 is used to receive the laser beam 2 reflected by the first reflective surface 31 of the triangular wave reflector 3, and The laser beam is refracted; the photodetector 5 is used to receive the laser beam refracted by the refracting mirror 4 and measure its incident position; the processing system is used to change the incident position of the laser beam 2 received by the photodetector 5 Calculate the displacement change value of the measured object.

[0038] Such as figure 2 As show...

Embodiment 2

[0054] can refer to image 3 Compared with the refraction displacement sensor described in Embodiment 1, the refraction displacement sensor in this embodiment differs in that: the refraction displacement sensor provided in this embodiment includes two reading heads, and the structure of the two reading heads consistent, and the positional relationship between the two reading heads satisfies: during the measurement process, at least one reading head can read the incident position variation of the laser beam on the photodetector.

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Abstract

The invention provides a refractive displacement sensor and a measuring method thereof. The displacement sensor comprises a triangular wave reflector, a laser source, a refractor, a photoelectric detector, and a processing system. The triangular wave reflector comprises at least one reflecting surface which is sequentially distributed along the moving direction; the laser source is used for emitting a laser beam, and the laser beam is incident on one reflecting surface of the triangular wave reflector; the refractor is used for receiving a laser beam reflected by the reflecting surface, and refracting the received laser beam; the photoelectric detector is used for receiving the laser beam refracted by the refractor and measuring the incident position of the laser beam; and the processing system is used for calculating the displacement change value of a detected object according to the incident position change amount of the laser beam received by the photoelectric detector. According tothe refractive displacement sensor and the measuring method thereof, the angle of the laser incident to the photoelectric detector can be reduced while the amplification factor of the displacement sensor is increased by arranging a refractor, so that the measurement precision of the displacement sensor is improved.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a refraction displacement sensor and a measurement method thereof. Background technique [0002] The new principle of displacement measurement based on the optical triangular amplification method is realized on the basis of the optical triangular amplification method, combined with triangular wave optical devices and high-precision PSD (Position Sensitive Device, position sensitive (sensitive) detector). The triangular wave optical device subdivides the linear displacement into equal intervals, reduces the processing accuracy and size requirements of optical devices, and at the same time reduces the size requirements of high-precision PSD, and realizes high-precision displacement measurement in a small range. However, the displacement sensor in the prior art, for example, the application number is 201520393174.9, and the name is the displacement sensor provided in "New Optic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张白康学亮
Owner BEIFANG UNIV OF NATITIES
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