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A capacitive differential pressure sensor and its output characteristic calculation method and manufacturing method

A technology of differential pressure sensor and manufacturing method, which is applied in fluid pressure measurement, calculation, and instrumentation using capacitance changes, and can solve problems such as temperature influence and complex sensor manufacturing process

Active Publication Date: 2019-08-02
JIANGSU UNIV
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  • Claims
  • Application Information

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Problems solved by technology

However, the manufacturing process of the sensor is relatively complicated, and at the same time, it is easily affected by temperature.

Method used

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  • A capacitive differential pressure sensor and its output characteristic calculation method and manufacturing method
  • A capacitive differential pressure sensor and its output characteristic calculation method and manufacturing method
  • A capacitive differential pressure sensor and its output characteristic calculation method and manufacturing method

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Embodiment Construction

[0046]The principle of differential pressure measurement and the manufacturing method of the sensor of the present invention will be described below in conjunction with the accompanying drawings and through corresponding calculation formulas.

[0047] The output characteristic calculation method of the capacitive differential pressure sensor for real-time dynamic pressure measurement of the present invention is characterized in that it includes the steps of: according to the pressure difference on both sides of the silicon layer 105 of the pressure-sensing film, the change of the pole distance between the pressure-sensing film and the electrode , to obtain the capacitance C of the capacitive sensor m According to the theoretical formula of the plate and shell, calculate the deflection of the deformation around the circular pressure-sensitive film, and obtain the relative change rate of the capacitance under any differential pressure; obtain the change of the air pressure of the...

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Abstract

The invention discloses a capacitive pressure difference sensor and an output characteristic calculation method thereof and a manufacturing method therefor. The invention establishes a calculation method of static and dynamic output characteristics of the sensor by using an ideal gas state equation and a plate-shell theory, and particularly provides a method for processing a pressure sensing filmthrough vacuum high-temperature annealing. A novel pressure difference sensor for dynamically detecting pressure in real time provided by the invention has the characteristics of simple sensor processing method and higher gas pressure detection resolution. The pressure sensing film having a circular hole and a cavity can be formed in one step by annealing a trench etched into a specific structurein high-temperature vacuum environment, without complicated SOI (Silicon-On-Insulator, silicon on an insulating substrate) or a complicated method for etching a cavity and a pressure sensing film on asilicon wafer.

Description

technical field [0001] The invention relates to the design of a MEMS capacitive differential pressure sensor, in particular to an output characteristic and a preparation method of a capacitive differential pressure sensor for real-time dynamic pressure measurement. Background technique [0002] Compared with common piezoresistive pressure sensors, MEMS capacitive pressure sensors are widely used because of their advantages such as small temperature drift, high signal-to-noise ratio, and fast response. [0003] At present, capacitive absolute pressure sensors are commonly used in the measurement of atmospheric pressure, which require a closed vacuum chamber, and have high requirements on the airtightness of the sensor chamber. This kind of sensor can measure the change of pressure, but the resolution is low, so it cannot meet the requirement of high-precision pressure measurement. [0004] For non-vacuum-sealed MEMS capacitive absolute pressure sensors, the cavity is at a ce...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/12G06F17/50
CPCG01L9/12G06F30/23
Inventor 郝秀春汪赟李宇翔蒋纬涵
Owner JIANGSU UNIV
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