A thermally compensated lightwave multiplexing and demultiplexing chip and its preparation method

Abstract

The invention relates to the technical field of optical wavelength division multiplexing, in particular to a thermally compensated optical wave multiplexing and demultiplexing chip and a preparation method thereof. The thermally compensated optical wave multiplexing and demultiplexing chip of the present invention includes an input array waveguide, an input star coupler, an array waveguide, an output star coupler, and an output array waveguide, and a thermal compensation structure is arranged on the input star coupler. The grooved grating is etched and processed by semiconductor technology, and the grooved grating is filled with silica gel with a negative thermal expansion coefficient. The thermally compensated light wave multiplexing and demultiplexing chip and its preparation method of the present invention are obtained by engraving the input star coupler. The grating structure is etched and filled with negative refractive index materials, which can realize temperature drift compensation. It has the advantages of no need for stress control, no need for fragment treatment, easy integrated manufacturing, compact structure, low transmission loss, uniform insertion loss, and small polarization-dependent loss.

Description

technical field [0001] The invention relates to the technical field of optical wavelength division multiplexing, in particular to a thermally compensated optical wave multiplexing and demultiplexing chip and a preparation method thereof. Background technique [0002] With the rapid development of technologies such as big data, cloud storage and computing, 5th generation mobile communication, Internet of Things, virtual reality and artificial intelligence, as the basis of information transmission, optical fiber communication system is still the bottleneck of the development of new generation information technology. As the basis of the optical fiber communication system, the development level of the optical communication device is the bottleneck in the development of the new generation of information technology, especially the optical multiplexer and demultiplexer, which is necessary to form a high-speed, large-capacity, intelligent optical fiber communication system. . [00...

AI Technical Summary

Problems solved by technology

[0016] However, there are technical difficulties in this invention, that is, the input waveguide needs to be cut (fragmentation treatment), the precision machining of the mechanical compensation mechanism and the selection of materials used, and the control of the distance between the two input waveguides after cutting.

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