Thermal compensation optical wave multiplexing and demultiplexing chip and preparation method thereof

Abstract

The invention relates to the technical field of optical wavelength division multiplexing, and in particular relates to a thermal compensation optical wave multiplexing and demultiplexing chip and a preparation method thereof. The thermal compensation optical wave multiplexing and demultiplexing chip provided by the invention comprises an input array waveguide, an input star coupler, an array waveguide, an output star coupler and an output array waveguide; a thermal compensation structure is arranged on the input star coupler, and a trench grating is processed through a semiconductor process; and negative thermal expansion coefficient silica gel is filled in the trench grating. According to the thermal compensation optical wave multiplexing and demultiplexing chip and the preparation methodthereof, the grating structure is etched on the input star coupler and is filled with a negative refractive index material to achieve temperature drift compensation; and the chip is free of stress control and fragmentation, and has the advantages of easy integration manufacture, compact structure, low transmission loss, uniform insertion loss, low polarization-dependent loss and the like.

Description

technical field [0001] The invention relates to the technical field of optical wavelength division multiplexing, in particular to a thermally compensated optical wave multiplexing and demultiplexing chip and a preparation method thereof. Background technique [0002] With the rapid development of technologies such as big data, cloud storage and computing, 5th generation mobile communication, Internet of Things, virtual reality and artificial intelligence, as the basis of information transmission, optical fiber communication system is still the bottleneck of the development of new generation information technology. As the basis of the optical fiber communication system, the development level of the optical communication device is the bottleneck in the development of the new generation of information technology, especially the optical multiplexer and demultiplexer, which is necessary to form a high-speed, large-capacity, intelligent optical fiber communication system. . [00...

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Problems solved by technology

[0016] However, there are technical difficulties in this invention, that is, the input waveguide needs to be cut (fragmentation treatment), the precision machining of the mechanical compensation mechanism and the selection of materials used, and the control of the distance between the two input waveguides after cutting.

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