Chip packaging structure
A chip packaging structure and chip technology, applied in the direction of semiconductor/solid-state device components, semiconductor devices, electrical components, etc., can solve problems such as pollution of the environment, and achieve the effect of avoiding environmental pollution and reducing use.
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[0093] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0094] see figure 1 , which shows a flowchart of a method for manufacturing a chip packaging structure according to an embodiment of the present invention. The manufacturing method of the chip packaging structure provided by the embodiments of the present invention can be applied to packaging the same or different types of chips. The aforementioned chips are, for example, power transistors, integrated circuit elements, or diodes. The power transistor is, for example, a vertical power transistor, an insulated gate bipolar transistor (Insulated Gate Bipolar Transistor, IGBT) or a bottom-source lateral diffusion MOSFET.
[0095] In step S10 , a wafer is provided, wherein the wafer has a plurality of semiconductor devices. The material tha...
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