Ionic nitriding technology assisted by arc electron source

Abstract

The invention provides an ionic nitriding technology assisted by an arc electron source. The ionic nitriding technology assisted by the arc electron source comprises the steps that S1, vacuumizing iscarried out; S2, preheating is carried out; S3, mechanical corrosion is carried out, specifically, argon is pumped to keep vacuum of 0.1-1Pa, the temperature is 200-600 DEG C, a bias voltage is applied between a workpiece and a cavity body, meanwhile, a furnace inner arc electron source is started, a main power supply current is 40-150 A, and arc discharge plasma is generated; an auxiliary anode electrode power supply is turned on, a current is 10-100 A, an electron current in the arc discharge plasma is led to enter a nitriding chamber space, and ironic bombardment mechanical corrosion is carried out on the workpiece for 5-30mins; S4, nitriding is carried out, the furnace inner temperature is kept 200-600 DEG C, the argon and nitrogen are pumped, the vacuum degree is kept at 0.1-1Pa, a voltage is applied between the workpiece and the cavity by a direct current bias voltage power supply, the arc electron source main power supply is turned on, the current is 40-150 A, and the arc discharge plasma is generated; the auxiliary anode electrode power supply is turned on, the current is 10-100A, the electron current of the arc discharge plasma is led to enter the nitriding chamber space,and ironic nitriding is carried out for 0.5-6 hours; and S5, cooling is carried out below 250 DEG C. According to the ionic nitriding technology assisted by the arc electron source, a glow discharge plasma can be enhanced, the reactivity is improved, time is shortened, and gas and energy consumption are reduced.

Description

technical field [0001] The invention relates to an ion nitriding process, in particular to an arc light electron source assisted ion nitriding process. Background technique [0002] The ion nitriding method is in a nitrogen-containing atmosphere of 13.33-1333Pa, with the furnace body as the anode and the workpiece to be processed as the cathode, and a DC voltage of several hundred volts is applied between the cathode and the anode. Photodischarge phenomenon, which produces soft light like neon lights covering the surface of the workpiece being processed. At this time, the ionized gas component is accelerated by the electric field, hits the surface of the workpiece to be processed to heat it, and at the same time relies on sputtering and nitrogen ions to bombard the surface of the workpiece to produce a nitriding reaction with it. This is called ion nitriding treatment. [0003] The ion nitriding method is completely different from the traditional method of nitriding by dec...

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Problems solved by technology

[0010] However, the existing ion nitriding glow discharge plasma is still relatively weak, and has disadvantages such as long nitriding process time, high energy consumption, and large gas consumption, and is not ideal for the concept of green manufacturing.

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