A process chip for high-throughput gene sequencing equipment and its application
A gene sequencing and high-throughput technology, which is applied in microlithography exposure equipment, biochemical equipment and methods, photolithography process exposure equipment, etc., can solve the problem of short life cycle of biochips, high cost of testing devices, and increased testing costs, etc. problems, to achieve accurate and effective sports performance, accurate test and evaluation results, and long life cycle
Active Publication Date: 2022-05-31
GEOPTICS SEQUENCING EQUIP CO LTD
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Problems solved by technology
[0004] The cost of existing workpiece platform test devices is relatively high, and a dedicated test platform needs to be built; moreover, the use of biochips to test optical system parameters will add the biochemical reaction error of preparing DNA nanospheres to the test results, and it is impossible to truly obtain the optical system itself. Performance parameter
At the same time, the biochip formed by DNA nanospheres has a short life cycle. Usually, after the biochip is loaded with DNA nanospheres, the survival time of the DNA nanospheres is only about 7 days. The biochip needs to be replaced frequently, which virtually increases the cost of testing.
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[0059] In an implementation manner of this example, all metal film or circular metal film marks are made of aluminum film.
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Abstract
The application discloses a process chip for high-throughput gene sequencing equipment and its application. The process chip of this application includes the silicon wafer and the marked metal film field of view and the OnPixle field of view on the silicon wafer; the marked metal film field of view includes: the first group: at least two groups of marked metal films are uniformly arranged on the circumference of the center of the field of view, Each group is provided with at least 2 circular metal film marks along the center line; the second group: the field of view of the marked metal film is divided into nine parts, and a group of edge graphics is set at the corresponding position in each area, and each group is represented by two identical edge graphics. The side lying "eight" shape is arranged, and the edge pattern is made of metal film marks; the third group: consists of N groups of metal film marks arranged in a line, each group includes two circular metal film marks, two circular metal film marks Mark spacing increases along the arrangement direction; several circular metal film marks are uniformly arranged in the field of view of OnPixle. The process chip of this application can effectively evaluate the motion performance of the workpiece table and the imaging quality of the optical system, without biochemical reaction errors, more accurate testing, and a long life cycle.
Description
A process chip for high-throughput gene sequencing equipment and its application technical field The application relates to the field of high-throughput gene sequencing equipment auxiliary devices, particularly to a kind of high-throughput gene sequencing Process chip of sequencing equipment and its application. Background technique In the process of developing high-throughput gene sequencing equipment based on fluorescence reaction and optical imaging, or, During regular maintenance and testing, key components and key indicators in high-throughput gene sequencing equipment need to be tested. For example: the motion accuracy of the workpiece table, the imaging quality of the optical system of the sequencer, distortion and other parameters to verify the key Whether the parameters meet the design requirements. This requires specific equipment or devices to build a special test platform to test different parameters. Run the test. Existing workpiece table test is ma...
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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCC12Q1/6869C12Q2535/122Y02P70/50
Inventor 孙志远乔彦峰苗亮杨旺
Owner GEOPTICS SEQUENCING EQUIP CO LTD
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