A preparation method of doped quartz glass evaporation material

A technology of quartz glass and vapor deposition materials, applied in glass manufacturing equipment, glass molding, glass furnace equipment, etc., can solve the problems of low hardness of ceramic particles, easy dusting on the surface of particles, splash points, etc., and achieve the evaporation rate. Uniform and stable, not easy for dust to fall off, and the effect of film quality improvement

Active Publication Date: 2021-07-06
CHANGZHOU PROSRUN PHOTOELECTRIC TECH CO LTD
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

The ceramic particles have many pores, the amount of outgassing during the evaporation process is large, the coating stability is poor, and the dust of the coating machine is easily aroused, resulting in poor film finish; the density is small, and the particles are easy to fly when the electron gun is evaporating; the hardness of the ceramic particles is not high, and the surface of the particles is easy to Dusty, unclean treatment, splash points caused by evaporation process

Method used

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  • A preparation method of doped quartz glass evaporation material
  • A preparation method of doped quartz glass evaporation material
  • A preparation method of doped quartz glass evaporation material

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preparation example Construction

[0031] In order to solve the above problems, the first aspect of the present invention provides a method for preparing a doped quartz glass evaporation material, the steps comprising:

[0032] (1) Preparation of ingredients: the raw material SiO 2 and Al 2 o 3 According to the weight ratio (1-X): X ingredients are mixed, wherein X=1~40wt%; Put the mixed material into the planetary ball mill, add zirconia grinding balls with a diameter of 2 mm and pure water at the same time, and water is the mixing medium in the planetary ball mill Carry out wet ball milling process on the ingredients, the ratio of material to ball is 10:1~20:1, and the ball milling time is 5~10h;

[0033] (2) Slurry spray granulation: put the slurry made after step (1) ball milling into a spray granulator to prepare spherical powder;

[0034] (3) Tablet forming: the composite powder made in step (2) is pressed and formed on a tablet press, and the tablet pressure is controlled at 100-200 MPa to prepare a s...

Embodiment 1

[0085] Embodiment 1 provides a kind of preparation method of doped quartz glass evaporation material, and the steps include:

[0086] (1) Preparation of ingredients: the raw material SiO 2 and Al 2 o 3 According to the weight ratio (1-X): X ingredients are mixed, wherein X=10wt%; the mixed material is put into the planetary ball mill, and zirconia grinding balls with a diameter of two millimeters and pure water are added simultaneously, and water is the mixing medium for the ingredients in the planetary ball mill Carry out the wet ball milling process, the material-ball ratio is 20:1, and the ball milling time is 10h;

[0087] (2) Slurry spray granulation: Put the slurry made after step (1) ball milling into a spray granulator to prepare spherical powder with a diameter of 100 μm;

[0088] (3) Tablet forming: the composite powder made in step (2) is pressed and formed on a tablet press, the tablet pressure is controlled at 200MPa, and a cuboid sheet-shaped green body is pre...

Embodiment 2

[0096] Embodiment 2 provides a kind of preparation method of doped quartz glass evaporation material, and the steps include:

[0097] (1) Preparation of ingredients: the raw material SiO 2 and Al 2 o 3 According to the weight ratio (1-X): X ingredients are mixed, wherein X=1wt%; the mixture is put into the planetary ball mill, and the zirconia grinding balls with a diameter of two millimeters and pure water are added simultaneously, and water is the mixing medium for the ingredients in the planetary ball mill Carry out the wet ball milling process, the ratio of material to ball is 10:1, and the ball milling time is 5h;

[0098] (2) Slurry spray granulation: Put the slurry made after step (1) ball milling into a spray granulator to prepare spherical powder with a diameter of 100 μm;

[0099] (3) Tablet molding: the composite powder made in step (2) is pressed and formed on a tablet machine, the tablet pressure is controlled at 100MPa, and a cuboid sheet-shaped green body is ...

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Abstract

The invention relates to the technical field of preparation of vapor deposition materials, in particular to a preparation method of doped quartz glass vapor deposition materials. A method for preparing a doped quartz glass evaporation material, the steps comprising: (1) preparing ingredients; (2) slurry spray granulation; (3) tablet molding; (4) sintered body preparation; (5) crushing (6) melting into lumps; (7) annealing treatment; (8) crushing into granules; (9) cleaning and packaging. The present invention adopts the steps of pulverizing the sintered body of silicon-aluminum ceramics, firing and annealing, and crushing again, so that the obtained silicon-alumina glass evaporation material has a high density, and the electron gun bombards the coating material without splashing due to its light weight; there are few pores, Reduce the amount of outgassing during the coating process, thereby improving the quality of the film layer; the evaporation angle is consistent, the evaporation rate is uniform and stable, and the electron gun is easy to focus; the coating material is not easy to have dust falling off, and the coating process will not cause sputtering points, and can be applied in batches to plastics On the lens, the operability of the coating and the quality of the coating layer after coating have been greatly improved.

Description

technical field [0001] The invention belongs to the technical field of evaporation material preparation, and more specifically, the invention relates to a method for preparing a doped quartz glass evaporation material. Background technique [0002] Lenses are widely used in the fields of vehicle, security, and photography. The lens on the lens is a key optical component that determines the quality of the lens. The material of the lens in the early stage is optical glass, but the optical glass base material needs to be machined into a lens, the processing cost is high, and the product batch stability is not good. With the rapid development of plastic technology, the transmittance and other properties of plastic substrates are close to those of glass substrates. Compared with the glass substrate, the plastic substrate can be formed in one time according to the required shape, and the processing is simple and the cost is low. At present, plastic base materials have increasing...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C6/04C03C3/06C03C1/02C03B20/00C03B5/16C03B25/00C23C14/24C23C14/10
CPCC03B5/16C03B20/00C03B25/00C03C1/00C03C1/026C03C3/06C23C14/10C23C14/24
Inventor 李新华
Owner CHANGZHOU PROSRUN PHOTOELECTRIC TECH CO LTD
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