Wafer frame box horizontal moving device and wafer feeding system
A technology of horizontal moving device and frame box, applied in transportation and packaging, electrical components, semiconductor/solid-state device manufacturing, etc., can solve problems such as hidden safety hazards and unstable structure, and achieve the effect of improving stability
Active Publication Date: 2019-09-27
SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD
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Problems solved by technology
[0005] The invention provides a wafer frame box horizontal moving device and a wafer feeding system to solve the problem that the structure is likely to be unstable and thus bring potential safety hazards
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[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0045] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present invention and the above drawings are used to distinguish similar objects and not necessarily Describe a specific order or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein can be practiced in sequences other than those ...
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The invention provides a wafer frame box horizontal moving device and a wafer feeding system. The wafer frame box horizontal moving device is used in a wafer frame box feeding process, and comprises a sliding rail, a slider, a horizontal motion driving mechanism, a lifting mechanism, and a bearing structure, wherein the bearing structure is mounted on the lifting mechanism; the slider and the lifting mechanism are directly or indirectly fixedly connected; the lifting mechanism is configured to drive the corresponding bearing structure to perform lifting motion, and thus, the bearing structure can be supported at the lower side of the wafer frame box after lifting to carry the wafer frame box; and the horizontal motion driving mechanism can drive the slider to move horizontally along the sliding rail to enable the lifting mechanism directly or indirectly connected to the slider to perform horizontal motion in synchronization with the bearing structure and the wafer frame box.
Description
technical field [0001] The invention relates to the field of semiconductors, in particular to a wafer frame box horizontal moving device and a wafer feeding system. Background technique [0002] Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. The wafer can be loaded in the wafer frame box, and the wafer frame box can be further understood as: wafer cassette. [0003] In the related art, in the process of wafer loading, if the wafer frame box needs to be transported in the horizontal direction, a horizontal moving device can usually be used, which can include a main body and a telescopic arm, and the wafer frame box is installed on the telescopic After the arm, the wafer frame box on the telescopic arm can be sent to the desired position through the horizontal expansion and contraction of the telescopic arm relative to the main body. [0004] However, when the horizon...
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Login to View More IPC IPC(8): H01L21/677
CPCH01L21/67763H01L21/67766
Inventor 葛林海李杰王利强丁双生赵建龙
Owner SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD