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Empty wafer box sending-out device and wafer feeding system

A wafer box and wafer technology, applied in the direction of conveyor objects, transportation and packaging, electrical components, etc., can solve the problems of unstable structure, unfavorable alignment and reception of empty wafer boxes, etc., and achieve the effect of improving stability

Active Publication Date: 2019-10-22
SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention provides an empty wafer box delivery device and a wafer feeding system to solve the problems of unstable structure and unfavorable alignment reception of empty wafer boxes

Method used

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  • Empty wafer box sending-out device and wafer feeding system
  • Empty wafer box sending-out device and wafer feeding system

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Embodiment Construction

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0045] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present invention and the above drawings are used to distinguish similar objects and not necessarily Describe a specific order or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein can be practiced in sequences other than those illustrated or...

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Abstract

The invention provides an empty wafer box sending-out device and a wafer feeding system. The empty wafer round box sending-out device comprises a horizontal moving slide rail, a horizontal moving slide block, a horizontal moving driving mechanism, a lifting mechanism, a horizontal adjusting mechanism and a bearing structure; the horizontal adjusting mechanism is used for adjusting the position ofthe bearing structure in the horizontal moving direction, and the lifting mechanism is used for driving the horizontal adjusting mechanism and the bearing structure on the horizontal adjusting mechanism to perform lifting motion, so that the bearing structure adjusted to the required position in the horizontal moving direction can be supported on the lower sides of two handle parts of the wafer box after being lifted to load the wafer box; and the horizontal movement driving mechanism is used for driving the horizontal moving slide block to move along the horizontal moving slide rail, so thatthe lifting mechanism, the horizontal adjusting mechanism, the bearing structure and the wafer box which are directly or indirectly connected with the horizontal moving slide block synchronously movehorizontally to send out the wafer box.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to an empty wafer box delivery device and a wafer feeding system. Background technique [0002] Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. Wafers can be loaded in a wafer frame box, and the wafer frame box can be further understood as: wafer cassette, which can also be understood as a wafer box. [0003] In the existing related art, during the wafer loading process, the wafer can be separated from the wafer cassette, and then the empty wafer cassette from which the wafer is separated can be moved out of the wafer loading system. Send the wafer box to the horizontal moving device. The horizontal moving device may include a main body and a telescopic arm. After the wafer box is sent to the telescopic arm, the wafer on the telescopic arm can be moved by the telescopic arm rela...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677
CPCH01L21/67766H01L21/67775
Inventor 葛林海丁双生赵建龙李杰王利强
Owner SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD