Empty cassette delivery device and wafer loading system
A wafer box and wafer technology, applied in the direction of conveyor objects, transportation and packaging, electrical components, etc., can solve the problems of unstable structure, unfavorable alignment and reception of empty wafer boxes, etc., and achieve the effect of improving stability
Active Publication Date: 2021-09-07
SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD
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Problems solved by technology
[0005] The present invention provides an empty wafer box delivery device and a wafer feeding system to solve the problems of unstable structure and unfavorable alignment reception of empty wafer boxes
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[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0045] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present invention and the above drawings are used to distinguish similar objects and not necessarily Describe a specific order or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein can be practiced in sequences other than those illustrated or...
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The present invention provides a device for sending out an empty wafer cassette and a wafer feeding system. The device includes a horizontally moving slide rail, a horizontally moving slider, a horizontally moving driving mechanism, a lifting mechanism, a horizontally adjusting mechanism, and a bearing structure ; The horizontal adjustment mechanism is used to adjust the position of the bearing structure along the horizontal movement direction, and the lifting mechanism is used to drive the horizontal adjustment mechanism and the bearing structure on it to perform lifting movement, so that along the horizontal The carrying structure whose moving direction is adjusted to the required position can be supported on the underside of the two handles of the wafer box after being raised to load the wafer box; the horizontal movement drive mechanism is used to drive the horizontal movement The slider moves along the horizontal moving slide rail, so that the lifting mechanism, the horizontal adjustment mechanism, the carrying structure and the wafer cassette directly or indirectly connected to the horizontal moving slider move horizontally synchronously , to send out the cassette.
Description
technical field [0001] The invention relates to the field of semiconductors, in particular to an empty wafer box delivery device and a wafer feeding system. Background technique [0002] Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. Wafers can be loaded in a wafer frame box, and the wafer frame box can be further understood as: wafer cassette, which can also be understood as a wafer box. [0003] In the existing related art, during the wafer loading process, the wafer can be separated from the wafer cassette, and then the empty wafer cassette from which the wafer is separated can be moved out of the wafer loading system. Send the wafer box to the horizontal moving device. The horizontal moving device may include a main body and a telescopic arm. After the wafer box is sent to the telescopic arm, the wafer on the telescopic arm can be moved by the telescopic arm rela...
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IPC IPC(8): H01L21/677
CPCH01L21/67766H01L21/67775
Inventor 葛林海丁双生赵建龙李杰王利强
Owner SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD