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Wafer frame box horizontal moving device and wafer loading system

A technology of horizontal moving device and frame box, which is applied in the direction of transportation and packaging, electrical components, conveyor objects, etc., and can solve problems such as structural instability and potential safety hazards

Active Publication Date: 2021-05-11
SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a wafer frame box horizontal moving device and a wafer feeding system to solve the problem that the structure is likely to be unstable and thus bring potential safety hazards

Method used

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  • Wafer frame box horizontal moving device and wafer loading system
  • Wafer frame box horizontal moving device and wafer loading system
  • Wafer frame box horizontal moving device and wafer loading system

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Embodiment Construction

[0044]Next, the technical solutions in the embodiments of the present invention will be apparent from the embodiment of the present invention, and it is clearly described, and it is understood that the described embodiments are merely embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, there are all other embodiments obtained without making creative labor without making creative labor premises.

[0045]The present invention and the scope of the invention and the terms "first", "second", "third" "third" "third" "" fourth ", and the third" "third" "" fourth ", and the third" "fourth", which are used to distinguish the similar object without Describe specific order or prior order. It should be understood that the data such as use can be interchanged in place so that the embodiments of the invention described herein can be implemented in the order other than those illustrated or described herein. Moreover, the terms "includin...

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PUM

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Abstract

The invention provides a wafer frame box horizontal moving device and a wafer loading system, which are used in the process of wafer frame box loading, including slide rails, sliders, horizontal motion drive mechanisms, lifting mechanisms, and bearing structures , the load-bearing structure is installed on the lifting mechanism, and the slider is directly or indirectly fixedly connected to the lifting mechanism; the lifting mechanism is used to drive the corresponding load-bearing structure to perform lifting movements, so that the load-bearing structure can be lifted after rising. Supported on the lower side of the wafer frame box to load the wafer frame box; the horizontal motion drive mechanism can drive the slider to move horizontally along the slide rail, so that it is directly or indirectly connected to the slider The lifting mechanism and the carrying structure and the wafer frame box move horizontally synchronously.

Description

Technical field[0001]The present invention relates to the field of semiconductor, and more particularly to a wafer frame cassette horizontal moving device and a wafer upper system.Background technique[0002]The wafer is a silicon wafer used in the production of silicon semiconductor integrated circuits, which is called wafers due to its shape is circular. The wafer can be loaded in a wafer frame cassette, and the wafer frame cartridge is further understood to be: Wafer Cassettee.[0003]In the existing related art, in the process of wafer material, the horizontal moving device can generally be employed in the process of the wafer frame cassette along the horizontal, wherein the body portion and a telescopic arm may be employed. The wafer frame cartridge is mounted to telescopic After the arm, the wafer frame cartridge on the telescopic arm can be sent to the desired position by retracting the horizontal stretching arm with respect to the body portion.[0004]However, when the horizontal ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677
CPCH01L21/67763H01L21/67766
Inventor 葛林海李杰王利强丁双生赵建龙
Owner SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD