Unlock instant, AI-driven research and patent intelligence for your innovation.

Ion cutting calibration device, calibration method and ion cutting device

A technology for ion cutting and calibrating devices, which is applied in plasma welding equipment, manufacturing tools, discharge tubes, etc., can solve the problems of shortening the time of ion cutting and inaccurate calibration of sample loading, etc., so as to reduce ion scratches, improve efficiency, shorten the effect of time

Active Publication Date: 2020-08-04
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
View PDF8 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the above-mentioned technical problems, the present invention provides an ion cutting calibration device, a calibration method and an ion cutting device, which can effectively avoid the problem that the calibration loading of the ion cutting calibration device is not accurate enough, and reduce the ion scratches on the surface of the calibration sample. And shorten the time of ion cutting, improve the efficiency of ion cutting

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Ion cutting calibration device, calibration method and ion cutting device
  • Ion cutting calibration device, calibration method and ion cutting device
  • Ion cutting calibration device, calibration method and ion cutting device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0085] figure 1 It is a schematic structural diagram of the first calibration component of the ion cutting calibration device provided in Embodiment 1 of the present invention. figure 2 It is a schematic structural diagram of the second calibration component of the ion cutting calibration device provided in Embodiment 1 of the present invention. image 3 It is a schematic structural diagram of the first reference platform in the second calibration component of the ion cutting calibration device provided in Embodiment 1 of the present invention. Figure 4 It is a schematic structural diagram of the second reference platform in the second calibration component of the ion cutting calibration device provided in Embodiment 1 of the present invention. Figure 5 It is a schematic diagram of the structure of the base of the first reference table and the first rotating part in the second calibration assembly of the ion cutting calibration device provided by Embodiment 1 of the presen...

Embodiment 2

[0131] Figure 9 It is a schematic flowchart of the ion cutting calibration method provided by the second embodiment of the present invention. Such as Figure 9 As shown, on the basis of the first embodiment above, the second embodiment of the present invention also provides an ion cutting calibration method, which is applied to the ion cutting calibration device of the first embodiment above, including:

[0132] S101: Install the sample to be calibrated and the sample holder on the first calibration surface of the first calibration component, adjust the position of the sample to be calibrated on the sample holder, and form an initial calibration sample;

[0133] S102: Set the initial calibration sample on the second calibration surface of the second calibration component, the second calibration surface is set opposite to the baffle of the ion cutting device, and adjust the initial calibration sample and the ion cutting The relative positions of the baffles of the device and...

Embodiment 3

[0149] On the basis of the first and second embodiments above, the third embodiment of the present invention also provides an ion cutting device, including an ion generator, a baffle 6 and the ion cutting calibration device in the first embodiment above;

[0150] The sample 3 to be calibrated and the sample holder 4 are set on the ion cutting calibration device, the baffle 6 is located between the sample 3 to be calibrated and the ion generator, and the ion emitting end of the ion generator faces the baffle 6 and the sample 3 to be calibrated.

[0151] Wherein, the ion generator generates an ion beam for cutting, the ion cutting calibration device is used to fix the calibrated sample, and the baffle 6 is used to block part of the ion beam from the ion generator to the sample, so that the sample formed after the ion beam cutting The cut surface is flat.

[0152] Wherein, the baffle plate 6 can be arranged relatively vertically or inclined relative to the second calibration plan...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides an ion cutting calibration device and method and an ion cutting device. The ion cutting calibration device comprises a first calibration module and a second calibration module;the first calibration module is provided with a first calibration surface; the second calibration module is provided with a second calibration surface; samples to be calibrated and a sample support plate are arranged on the first calibration surface, so that the position of the samples to be calibrated on the sample support plate is adjusted, and primary-calibrated samples are formed; the primary-calibrated samples are arranged on the second calibration surface; and the second calibration surface and a baffle plate of the ion cutting device are oppositely arranged to adjust relative positionsof the primary-calibrated samples and the baffle plate of the ion cutting device and to form calibrated samples. The ion cutting device comprises an ion generator, the baffle plate and the ion cuttingcalibration device. The ion cutting calibration device improves the calibration and sample loading accuracy, reduces ion scratches on the surfaces of the calibrated samples, shortens the ion cuttingtime, and improves the ion cutting efficiency.

Description

technical field [0001] The invention relates to sample surface treatment technology, in particular to an ion cutting calibration device, a calibration method and an ion cutting device. Background technique [0002] Mounting calibration plays an extremely important role in many scenarios. For example, before ion cutting, it is necessary to use a baffle to cover the part of the sample that is not cut, and to expose the part that needs to be ion cut. Obtain a flat sample cut surface. It can be seen that accurate sample loading has a great influence on the cutting effect of ions. [0003] In the prior art, usually the bottom surface of the sample is first glued to the sample holder with double-sided adhesive, so that one side of the sample is aligned with the reference backing plate, and then the sample holder is transferred to the three-axis translation stage, and adjusted by the three-axis translation stage. The up and down, front and back, and left and right positions of t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/00B23K10/00
CPCB23K10/00
Inventor 杜忠明杨继进周飞陈卫
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI