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Cassette supply system to store and handle cassettes and processing apparatus equipped therewith

一种供应系统、处理器的技术，应用在通用控制系统、控制/调节系统、运输和包装等方向，能够解决昂贵系统、劣化系统吞吐量、剧烈移动等问题

Active Publication Date: 2020-03-24
ASM IP HLDG BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This over-determined position can cause violent movement of the box 3 teleportation, which can lead to particle generation
To mitigate the jerky movements, the end effector 9 may need to move very slowly with high precision as the cassette 3 is transferred to and from the substrate 1, which may degrade the throughput of the system and / or result in a more expensive system

Method used

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  • Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
  • Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
  • Cassette supply system to store and handle cassettes and processing apparatus equipped therewith

Examples

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Embodiment Construction

[0024] Figure 4 shows diagrammatic and partially exposed perspective views, and Figure 5 Shown is a plan view of a substrate processing apparatus for substrates supplied in cassettes and provided with a cassette supply system according to an embodiment. The processing area 21 includes a vertical reactor, and a substrate processing chamber 22 is provided between the processing area 21 and a cartridge processing area 23 to provide substrates to the reactor. A cassette supply system according to the embodiment is provided at the cassette processing area 23 to convey and store cassettes 3 . An input / output station for feeding or removing cassettes 3 into or out of the plant is indicated by 33 .

[0025] The substrates 13 are supplied in cassettes 3 which can be placed on an input / output station 33 . The cassette handler 32 may transfer the cassettes from the input / output station 33 into the cassette storage device 8 located in the cassette processing area 23 . This is optiona...

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PUM

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Abstract

The invention relates to a cassette supply system to store and handle cassettes for substrates and a processing apparatus for processing substrates equipped with said system. The system having a cassette storage provided with base plate constructed and arranged to support cassettes. Also a cassette handler with an end effector with at least one protrusion to support and position the cassette on the end effector is provided to transfer cassettes to and from the base plate. The base plate may be provided with a substantially flat surface to support the cassettes.

Description

technical field [0001] The present invention relates to a cassette supply system for storing and processing cassettes for substrates, and a processing apparatus equipped therewith. The cartridge supply system includes: [0002] a cartridge storage device provided with a base plate constructed and arranged to support the cartridge; and [0003] A cassette handler for transferring cassettes to and from the substrate. Background technique [0004] When processing substrates such as semiconductor wafers in processing equipment, the processing equipment is adapted and optimized to the dimensions of the substrate to be processed. The dimensions of the substrates are standardized in a limited number of discrete dimensions, with a trend towards increasing dimensions over the past decade in order to increase production efficiency. Recently introduced substrate sizes are 200mm and 300mm diameter. Wafer fabrication facilities will typically use one substrate size. [0005] To tran...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/68
CPCH01L21/67763H01L21/67766H01L21/68H01L21/67769H01L21/67379H01L21/67775H01L21/6773H01L21/67259H01L21/67282H01L21/67736G05B19/4097G05B2219/36106G05B2219/45031
Inventor C·德里德
Owner ASM IP HLDG BV
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