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Fabrication method of microchannel structure

A manufacturing method and technology of microfluidic channels, applied in chemical instruments and methods, laboratory containers, laboratory utensils, etc., can solve the problems of transporting gas and being unusable

Active Publication Date: 2021-10-12
MICROJET TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In the prior art, although an integrally formed miniaturized fluid delivery structure has been produced by the MEMS process, the existing miniaturized structure produced by the MEMS process cannot be used due to the different actuation methods during use. Gas transportation is therefore an important part of development, how to break through its technical bottleneck with innovative miniaturized structures

Method used

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  • Fabrication method of microchannel structure
  • Fabrication method of microchannel structure
  • Fabrication method of microchannel structure

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Embodiment Construction

[0067] Some typical embodiments embodying the features and advantages of the present application will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different aspects without departing from the scope of this case, and that the descriptions and diagrams therein are used for illustration in nature rather than to limit this case.

[0068] The micro-channel structure in this case is used to transport fluid, and increase or control the flow rate of fluid. see figure 1 , in the embodiment of this case, the microfluidic channel structure 1 includes: a substrate 1a, a first insulating layer 1b, a supporting layer 1c, a valve layer 1d, a second insulating layer 1e, a vibrating layer 1f, and a lower electrode Layer 1g, a piezoelectric actuation layer 1h, a pad layer 1i, and a mask layer 1j are fabricated as follows.

[0069] see figure 2 as well as Figure 3A , in this embodiment, as shown in...

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Abstract

A method for manufacturing a microfluidic channel structure, comprising: 1) providing a substrate; 2) depositing and etching a first insulating layer; 3) depositing and etching a supporting layer; 4) depositing and etching a valve layer; 5) depositing and etching a second insulating layer; 6) depositing and etching a vibrating layer, a lower electrode layer and a piezoelectric actuation layer; 7) providing a photoresist layer for depositing and etching a plurality of welding pads; 8) depositing and etching a mask layer; 9) etching a first chamber; and 10) etching a second chamber.

Description

technical field [0001] This case relates to a method for manufacturing a micro-channel structure, especially a method for manufacturing a micro-channel structure driven by a power source with different phase charges. Background technique [0002] At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery included in products such as micro pumps, sprayers, inkjet heads, and industrial printing devices Structure is its key technology. [0003] With the rapid development of science and technology, the application of fluid conveying structure is becoming more and more diversified, such as industrial application, biomedical application, medical care, electronic heat dissipation, etc., and even the recent popular wearable devices can be seen. It can be seen that the traditional The fluid conveying structure of the fluid has gradual...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L3/00
CPCB01L3/502707
Inventor 莫皓然余荣侯张正明戴贤忠廖文雄黄启峰韩永隆蔡长谚
Owner MICROJET TECH