Laminate substrate manufacturing apparatus, laminate substrate manufacturing line and laminate substrate manufacturing method
A technology for manufacturing devices and substrates, which is applied in the field of laminated substrate manufacturing devices, and can solve problems such as inability to transport workpieces, inability to laminate workpieces, and quality problems.
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Embodiment approach 1
[0070] 1. Workpiece W and pallet P
[0071] Before describing the laminated substrate manufacturing apparatus 1 , the workpiece W and the pallet P to be processed by the laminated substrate manufacturing apparatus 1 will be described.
[0072] figure 1 It is a figure shown for explaining the workpiece|work W and pallet P. figure 1 (a) is a plan view after placing the workpiece W and the pallet P upright on a horizontal plane, figure 1 (b) is figure 1 (a) A-a cross-sectional view. The symbol SL of the two-dot dash line represents a seal line which will be described later, and the symbol WSF represents the upper end surface of the workpiece W. As shown in FIG.
[0073] (1) Workpiece W
[0074] The "work W" in this specification refers to "the totality of the substrate BD and the plurality of single-chip PCs" in a state where the plurality of single-chip PCs are pre-pressed on the substrate BD (see figure 1 ).
[0075] A plurality of single-chip PCs are placed on the ...
Embodiment approach 2
[0216] Below, refer to Figure 9 The configuration of the laminated substrate production line 10 according to the second embodiment will be described. Figure 9 It is a schematic diagram shown for explaining the laminated board production line 10 concerning Embodiment 2.
[0217] The laminated substrate production line 10 according to Embodiment 2 manufactures a laminated substrate by pre-pressing a plurality of individual PCs on a substrate BD and further performing main pressure bonding.
[0218] The laminated substrate production line 10 involved in Embodiment 2 includes: a pre-crimping device 7 for pre-crimping a plurality of single PCs on the substrate BD; a tray distribution device 8 for removing the tray P from the pre-crimping device Distributed to any one of a plurality of pallet conveying devices 9; a plurality of pallet conveying devices 9, one end of which is respectively connected with the pallet distributing device 8, and conveys the pallet P distributed from th...
example 1
[0228] Since as long as multiple single sheets can be laminated, a single single sheet can be laminated, and the same effect is achieved, so this laminated substrate manufacturing device is also equivalent to the laminated substrate manufacturing device of the present invention. 1.
[0229] (2) In addition, if Figure 10 As shown in (a), a sealing member (third sealing member 234 ) made of resin or the like may be attached to the upper end surface of the tray mounting table 230 .
[0230]When the tray P is placed on the upper end surface of the tray placement table 230, the third sealing member 234 can relax the impact. In addition, since the tray P is placed in a manner adapted to the tray placement table 230, it is possible to place the tray P The positioning is carried out more accurately. In addition, a sealing member (third sealing member 234 ) made of resin or the like may be attached to the lower end surface of the tray P. As shown in FIG.
[0231] And, it is also po...
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