Inertial sensor, electronic device, and movable body
An inertial sensor and dynamic body technology, which is applied in the direction of using inertial force for acceleration measurement, instruments, measuring devices, etc., can solve the problem that it is difficult to fully improve the impact resistance of inertial sensors.
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no. 1 approach
[0031] figure 1 It is a plan view showing the inertial sensor according to the first embodiment. figure 2 yes figure 1 The A-A line sectional view in. image 3 is the top view of the inertial sensor. Figure 4 and Figure 5 Each is a plan view for explaining the function of the stopper.
[0032] Hereinafter, for convenience of description, three axes orthogonal to each other are referred to as an X axis, a Y axis, and a Z axis. In addition, the direction along the X-axis, that is, the direction parallel to the X-axis is also called "X-axis direction", the direction parallel to the Y-axis is called "Y-axis direction", and the direction parallel to the Z-axis is called "Z-axis direction". Axis Direction". In addition, the front end side in the arrow direction of each axis is also referred to as "positive side", and the opposite side is also referred to as "negative side". In addition, the positive side in the Z-axis direction is also referred to as "up", and the negative...
no. 2 approach
[0066] Figure 6 It is a plan view showing the inertial sensor according to the second embodiment.
[0067] This embodiment is the same as the aforementioned first embodiment except that the structure of the stopper 4 is different. It should be noted that in the following description, regarding the present embodiment, the description will focus on the differences from the previous embodiment, and the description of the same matters will be omitted. In addition, in Figure 6 In , the same reference numerals are assigned to the same structures as those in the aforementioned embodiment.
[0068] Such as Figure 6 As shown, in the inertial sensor 1 of this embodiment, the second stopper 42 is located outside the movable body 32 and is supported by the support portion 49 together with the first stopper 41 . That is to say, in this embodiment, the first stopper 41 and the second stopper 42 are located outside the movable body 32 together. In addition, corresponding to this, a p...
no. 3 approach
[0072] Figure 7 It is a plan view showing the inertial sensor according to the third embodiment.
[0073] This embodiment is the same as the aforementioned first embodiment except that the structure of the stopper 4 is different. It should be noted that in the following description, regarding the present embodiment, the description will focus on the differences from the previous embodiment, and the description of the same matters will be omitted. In addition, in Figure 7 In , the same reference numerals are assigned to the same structures as those in the aforementioned embodiment.
[0074] Such as Figure 7 As shown, in the inertial sensor 1 of this embodiment, the first stopper 41 is located inside the movable body 32 . That is to say, the first stopper 41 and the second stopper 42 are located inside the movable body 32 together. Specifically, the movable body 32 has a through hole 329 formed at the front end of the first movable part 321 , and the first stopper 41 is ...
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