Three-dimensional vertical resistive random access memory array and operation method and device thereof, equipment and medium
A technology of resistive memory and operation method, applied in static memory, digital memory information, information storage and other directions, can solve the problems of high error programming operation of unselected cells, inability to read operations of a single or specific multiple devices, etc., to overcome errors. The effect of programming operations, avoiding misprogramming operations, and reducing the probability of misprogramming
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[0044] First embodiment
[0045] The first exemplary embodiment of the present disclosure provides an operating method of a three-dimensional vertical resistive random access memory array. A specific resistive random access memory in the three-dimensional vertical resistive random access memory array is selected as a selected cell for programming operations.
[0046] First combine figure 1 The structure of the three-dimensional vertical resistive random access memory array of this embodiment is introduced.
[0047] The operating method of the present disclosure is applicable to a three-dimensional vertical resistive random access memory array. The three-dimensional vertical resistive random access memory array includes: a laminated structure in which a planar conductor layer and an insulating layer are sequentially stacked; a columnar electrode vertically penetrating the laminated structure; a resistive dielectric layer surrounding the outer periphery of the columnar electrode; The...
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[0071] Second embodiment
[0072] In a second exemplary embodiment of the present disclosure, a method for operating a three-dimensional vertical resistive random access memory array is provided. A specific one of the three-dimensional vertical structure resistive random access memory array is selected or is located on the same word line. / Bit line specific multiple resistive random access memory as selected cells for read operations. The read operation method of this embodiment can perform read and write operations on the same device as the programming operation of the first embodiment, or it can be implemented separately with the method of the first embodiment to implement the read operation illustrated in this embodiment separately (Read operation) or separately implement the write operation (program operation) exemplified in the first embodiment.
[0073] Image 6 It is a flowchart of a method for reading a three-dimensional vertical resistive random access memory array accord...
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[0094] The third embodiment
[0095] In the third exemplary embodiment of the present disclosure, a three-dimensional vertical resistive random access memory array is provided for performing the above-mentioned operation method.
[0096] For example, as shown in reference 1, the three-dimensional vertical resistive random access memory array of this embodiment includes: a laminated structure in which a planar conductor layer and an insulating layer are sequentially stacked; a columnar electrode vertically penetrating the laminated structure; and a resistive sensor surrounding the periphery of the columnar electrode Dielectric layer; a resistive random access memory comprising a planar conductive layer, a resistive dielectric layer and a columnar electrode formed at the intersection of a laminated structure and a columnar electrode, wherein the planar conductive layer and the columnar electrode respectively serve as the resistive random access memory At the same time, the planar con...
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