A miniaturized micro-flow controller based on ltcc
A controller and micro-flow technology, applied in the flow control of electrical devices, chemical instruments and methods, chemical/physical processes, etc., can solve the problems of high cost, difficult processing, long cycle, etc. The effect of tight channels and increased fluid resistance
Active Publication Date: 2022-04-19
BEIJING INST OF CONTROL ENG
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Problems solved by technology
The above-mentioned micro-flow restrictors are all made of metal materials, and have encountered difficulties in miniaturization and light weight of the products; in addition, special precision machining and welding processes (such as electrochemical etching, laser welding, etc.) have been involved in the production process. Holes and diffusion welding, etc.), processing difficulty, high cost, long cycle
Therefore, traditional micro-flow controllers cannot achieve miniaturization and light weight, which has become a bottleneck restricting its further expansion of application
Method used
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[0026] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art. It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0027] figure 1 It is a structural composition diagram of the LTCC-based miniaturized micro-flow controller of the present invention. Such as figure 1 As s...
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Abstract
The invention discloses a miniaturized micro flow controller based on LTCC, comprising: a first ceramic sheet, a second ceramic sheet, a third ceramic sheet, a fourth ceramic sheet, a fifth ceramic sheet, a sixth ceramic sheet, a seventh ceramic sheet Ceramic sheet, the eighth ceramic sheet and the ninth ceramic sheet; wherein, the first ceramic sheet, the second ceramic sheet, the third ceramic sheet, the fourth ceramic sheet, the fifth ceramic sheet, the sixth ceramic sheet, the seventh ceramic sheet, The eighth ceramic sheet and the ninth ceramic sheet are stacked together in sequence and sintered at high temperature; wherein, the high temperature is 450 degrees Celsius to 850 degrees Celsius; the first ceramic sheet, the second ceramic sheet, the third ceramic sheet, the fourth ceramic sheet, The diameters of the fifth ceramic sheet, the sixth ceramic sheet, the seventh ceramic sheet, the eighth ceramic sheet and the ninth ceramic sheet are all equal. The invention realizes miniaturization and light weight of products.
Description
technical field [0001] The invention belongs to the technical field of micro-flow fluid management systems, and in particular relates to a miniaturized micro-flow controller based on LTCC. Background technique [0002] The micro-flow controller is the core component of the precise fluid management system, which directly determines the control accuracy of the micro-flow. For example, the flow controller of the space vehicle electric propulsion xenon gas supply system directly determines the performance and life of the electric thruster. Due to the high specific impulse of the electric thruster, the working fluid flow rate consumed by it is very small (μg / s-mg / s level), which requires the micro-flow controller to have ultra-high flow resistance characteristics. Micro-flow controllers generally achieve ultra-high flow resistance through complex and lengthy fluid channels (such as capillary tube type, porous metal sintered type, and multi-layer orifice plate type, etc.). Chines...
Claims
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IPC IPC(8): G05D7/06B01J19/00F16K99/00
CPCF16K99/0032F16K99/0042F16K2099/008F16K2099/0073F16K2099/0096F16K2099/0086
Inventor 官长斌沈岩刘旭辉姚兆普张美杰南柯曾昭奇范旭丰于金盈惠欢欢扈延林毛威王兆立李恒建张良李伟赵立伟庚喜慧谢继香任凯张志伟王建王国华刘鹏飞
Owner BEIJING INST OF CONTROL ENG