Transport vehicle

A conveying vehicle and conveying road technology, which is applied in the field of conveying vehicles and can solve the problems of inability to realize the conveying of objects to be processed.

Pending Publication Date: 2021-05-21
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the structural reasons of various devices involved in the conveyance of the workpiece, etc., it may not be possible to smoothly convey the workpiece

Method used

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Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0047] figure 1 It is a top view showing a configuration example of the conveyance system 2 of the present embodiment, figure 2 It is a functional block diagram showing an example of the connection relationship of the transport system 2 . Such as figure 1 As shown, the conveying system 2 of this embodiment includes a plate-shaped workpiece 11 for processing by a processing device (cutting device) 4 (see Figure 8 of (A), Figure 8 (B) etc.) the conveyance path 6 for conveyance.

[0048] The workpiece 11 is, for example, a disk-shaped wafer formed of a semiconductor material such as silicon. The front side of the workpiece 11 is divided into a plurality of small areas by a plurality of dividing lines (separation lanes) intersecting each other, and IC (Integrated Circuit, integrated circuit), MEMS (Micro Electro Mechanical Systems) are formed in each small area. , MEMS) and other devices.

[0049] A tape (dicing tape) 13 having a larger diameter than the workpiece 11 is a...

Embodiment approach 2

[0383] In this embodiment, the processing apparatus of the form different from the said embodiment is demonstrated. Figure 31 It is a perspective view showing the internal structure of the processing device (cutting device) 402 of this embodiment. In addition, in the following description, the same code|symbol is attached|subjected to the component common to the said embodiment, and detailed description is abbreviate|omitted.

[0384] The container 102 of the transport vehicle 10 is not placed on the lift table 404 of the processing device 402 . Instead, on the elevating table 404 of the processing device, the same two-stage cassette storage mechanism 24 (that is, the first cassette storage mechanism 24a and the second cassette storage mechanism 24b) as the loader / unloader 8 of the above-mentioned embodiment is provided. Two-stage cassette storage mechanism 406 (1st cassette storage mechanism 406a and 2nd cassette storage mechanism 406b).

[0385] That is, the cassette 30 i...

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PUM

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Abstract

The invention provides a transport vehicle which can transport a processed object efficiently and safely. A transport vehicle which travels on a transport path provided above a processing device and transports an object to be processed, the transport vehicle comprising: a frame to which wheels for traveling are mounted; a container for accommodating the object to be processed; a lifting unit which is provided on the frame and which lifts the container by suspending the container; a contact member provided on the frame, the contact member being in contact with the upper surface side of the container when the workpiece is conveyed on the conveyance path; and a control unit that controls the lifting unit, the lifting unit having: a suspension member, one end side of which is connected to the container; and a motor that generates power for winding the suspension member, wherein the control unit stops the rotation of the motor in accordance with a change in the current value of the motor when the container is brought into contact with the contact member by winding the suspension member.

Description

technical field [0001] The present invention relates to a transport vehicle used for transport of workpieces. Background technique [0002] In the manufacturing process of device chips incorporated in electronic equipment and the like, plate-shaped workpieces represented by semiconductor wafers and resin-encapsulated substrates are processed by various processing devices. When conveying a workpiece to this processing apparatus, a cassette capable of accommodating a plurality of workpieces is generally used. When the processing apparatus receives a cassette containing a plurality of workpieces, the workpieces are sequentially taken out from the cassette and processed. [0003] In order to improve the efficiency of processing a workpiece, a plurality of processing devices may be used in parallel. In this case, it is necessary to transport the workpiece to each of the plurality of processing devices at an appropriate timing. Therefore, a conveyance system has been proposed i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G35/00
CPCB65G35/00B65G1/0457H01L21/67706H01L21/67724H01L21/67733
Inventor 中幸一田村公司
Owner DISCO CORP
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