Quantitative and qualitative device and method for impurities in high-purity chlorine trifluoride
A technology for chlorine trifluoride and impurities, applied in the field of quantitative and qualitative devices for impurities in high-purity chlorine trifluoride, to achieve the effect of direct separation
Active Publication Date: 2022-07-15
FUJIAN DEER TECH CORP
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Therefore, this method cannot effectively perform qualitative and quantitative analysis on these types of corrosive gases.
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[0029] In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiment of this invention, and it is not an embodiment of all. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments ob...
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The invention provides a quantitative and qualitative device and method for impurities in high-purity chlorine trifluoride. The device includes: a switching unit, including an intake pipe, an exhaust pipe, a six-way valve, a first four-way valve and a second four-way valve, the six-way valve includes a valve to f valve, the first four-way valve includes g valve, h valve Valve, i valve and j valve, the second four-way valve includes k valve, l valve, m valve and n valve; the inlet pipe and the outlet pipe are respectively connected with a valve and b valve; the quantitative ring is connected with c valve and b valve respectively at both ends. f valve; carrier gas unit, respectively connected to e valve, i valve and m valve; separation unit, including fluoroether oil column connected to d valve and g valve at both ends, first molecular sieve connected to j valve and k valve at both ends , the second molecular sieve connected with the l valve; the analysis unit, including the first TCD connected with the h valve, the second TCD connected between the first molecular sieve and the k valve, and the PDD connected to the second molecular sieve.
Description
technical field [0001] The invention relates to a device and method for quantitative and qualitative impurities in high-purity chlorine trifluoride, in particular to a device and method for quantitative and qualitative impurities in high-purity chlorine trifluoride by gas chromatography. Background technique [0002] Chlorine trifluoride is a toxic and highly corrosive compound. At present, although there is a synthetic technology of industrial-grade chlorine trifluoride in China, there is no mature analytical method for impurities in chlorine trifluoride. Internationally, the impurity analysis method of chlorine trifluoride is mainly to remove the corrosive gas and then analyze the non-corrosive gas components (oxygen, nitrogen, carbon tetrafluoride, etc.), these non-corrosive gas components are impurity components. This method has great defects, because in the production process of chlorine trifluoride, in addition to chlorine trifluoride, there may also exist corrosive g...
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IPC IPC(8): G01N30/02G01N30/20G01N30/66G01N30/72
CPCG01N30/02G01N30/20G01N30/66G01N30/72G01N2030/201
Inventor 李纪明杨建中陈施华华小林杜勇
Owner FUJIAN DEER TECH CORP