Panel defect detection equipment and panel defect detection method
A defect detection and panel technology, which is applied in the direction of optical defect/defect, measuring device, instrument, etc., can solve the problem that it is difficult to ensure the stability of the imaging quality of the first-scan camera, and achieve the effect of taking into account accuracy and improving efficiency
Active Publication Date: 2021-07-27
哈工大机器人(中山)无人装备与人工智能研究院
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Problems solved by technology
[0003] The problem solved by the invention is that the existing structural design is difficult to ensure the imaging quality of the first-scan camera and the stability of defect detection
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[0056] In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0057] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear" etc. is based on the orientation or positional relationship shown in the drawings, and is only for convenience The present invention is described and simplified descriptions do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as limiting the present invention.
[0058] The terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying...
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The invention provides panel defect detection equipment and a panel defect detection method, and relates to the technical field of panel defect detection. The equipment comprises a supporting table, a first gantry, a second gantry, a scanning mechanism and a reinspection mechanism, the first gantry comprises a first stand column and a first cross beam arranged on the first stand column, and the scanning mechanism is arranged on the first cross beam; the first cross beam is suitable for moving in the extending direction of the first cross beam relative to the first stand column, the second gantry comprises a second stand column and a second cross beam arranged on the second stand column, and the rechecking mechanism is arranged on the second cross beam. Through the arrangement, the scanning mechanism can be driven to move by moving the gantry cross beam, compared with an independent movement mode of the scanning mechanism, the scanning mechanism has the advantages that the movement part is a whole of the scanning mechanism and the gantry cross beam and is high in rigidity, so that the scanning mechanism is small in local flexural deflection and more stable in structure, and the imaging quality of the scanning mechanism and the stability of defect detection can be better ensured.
Description
technical field [0001] The present invention relates to the technical field of panel defect detection, in particular to a panel defect detection device and a panel defect detection method. Background technique [0002] During the manufacturing process of liquid crystal display panels, many defects may be generated. These defects can be roughly divided into macroscopic defects and microscopic defects. Microscopic defects are difficult to detect with naked eyes. Therefore, in order to detect the microscopic defects of the panel, corresponding panel defect detection equipment has appeared on the market. In the existing panel defect detection equipment, the first-scan camera and the second-scan camera are respectively arranged on two gantry with a certain distance. The camera moves step by step on the gantry to conduct a preliminary scan of the panel to be inspected. The re-scan camera moves on the gantry to the defect point above the defect coordinates obtained during the initi...
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IPC IPC(8): G01N21/95G01N21/01
CPCG01N21/95G01N21/8851G01N21/01G01N2021/9513G01N2021/8854G01N2021/8861G01N2021/8887
Inventor 王绍凯黄运黄新剑谭久彬
Owner 哈工大机器人(中山)无人装备与人工智能研究院