Bulk acoustic wave resonator assembly, manufacturing method thereof, filter and electronic equipment

Abstract

The invention relates to a bulk acoustic wave resonator assembly and a manufacturing method. The assembly includes: a substrate; an acoustic mirror cavity; at least two resonance structures which share the same piezoelectric layer and the substrate; and a supporting layer arranged between the substrate and the piezoelectric layer, wherein the piezoelectric layer is a single-crystal piezoelectric layer, the piezoelectric layer and the substrate are arranged in parallel in a spaced mode, and the supporting layer defines at least a portion of a boundary of the acoustic mirror cavity. The invention also relates to a filter and an electronic device.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductors, and in particular to a bulk acoustic wave resonator component, a method for manufacturing a bulk acoustic wave resonator component, a filter with the component, and an electronic component with the component or filter equipment. Background technique [0002] Generally, among the filters prepared based on the piezoelectric film and electrode layer-by-layer growth process, the substrate 100 of the known filter composed of several individual acoustic wave resonators has the following features: Figure 1A The top view structure shown. along Figure 1A The straight line AA' in the cut, can get as follows Figure 1B The sectional structure or cross-sectional structure shown. [0003] Figure 1A and 1B The filter shown in includes several individual acoustic wave resonators, and the specific structure of each resonator includes a substrate 100; cavity-type acoustic mirrors 111, 112...

AI Technical Summary

Problems solved by technology

However, due to the non-straight structure of the piezoelectric film or piezoelectric layer, the stress inside, especially the curved part of the film (such as the piezoelectric layer at the edge of the bottom electrode) is very large; during the working process, part of the acoustic energy of the resonator is transmitted to The bending part of the piezoelectric film causes it to generate strong mechanical vibration; in the absence of external structural support in the bending part of the piezoelectric film, the bending part is very easy to break, making the resonator and filter invalid (poor reliability)

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