Piezoelectric micropump array, microsystem and thermal management method for microsystem

Abstract

The present invention provides a piezoelectric micropump array, a microsystem, and a thermal management method for the microsystem. The piezoelectric micropump array includes N distributedly connected piezoelectric micropump units, and the piezoelectric micropump unit has a first port, The second port, the third port and the fourth port; the first ports of the N piezoelectric micropump units are connected together through the flow channel, the fourth ports of the N piezoelectric micropump units are connected together through the flow channel, and the first ports of the N piezoelectric micropump units are connected together through the flow channel. The third port of the i piezoelectric micropump is connected to the second port of the i+1th piezoelectric micropump unit through a flow channel; the N piezoelectric micropumps in the array are connected in a distributed manner through an external electrical signal The piezoelectric micropump unit is controlled, which can effectively change the series-parallel connection state of N piezoelectric micropump units. When used in series, the output pressure of the fluid can be increased, and when used in parallel, the input and output flow of the fluid can be increased, so that it can effectively meet the needs of micro-pumps. The large flow and high pressure requirements of the microfluidic heat dissipation of the system improve the heat dissipation effect of the microsystem.

Description

technical field [0001] The invention relates to the technical field of integrated circuits, in particular to a piezoelectric micropump array, a microsystem and a thermal management method for the microsystem. Background technique [0002] As the power of micro-flow supply, micro-pump is the core component of micro-flow control system. Micropumps are very important micro-actuators in the field of microfluidics. They are widely used in biomedical MEMS, chip cooling systems and micro-satellites, etc., especially in the field of biomedical MEMS. Micropumps are used in drug delivery, DNA synthesis, trace Aspects such as fluid supply and precise control play a vital role. The high-efficiency microfluidic cooling technology for a new generation of high-power microsystems requires micropumps that can provide large output flow and high output pressure. The piezoelectric micropump realized by the inverse piezoelectric effect has the advantages of high output pressure, small size, si...

AI Technical Summary

Problems solved by technology

[0003] However, due to the technical bottleneck of piezoelectric micropumps, the working flow and output pressure of a single piezoelectric micropump cannot meet the needs of rapidly developing high-efficiency microfluidic cooling technologies such as micro-spray and micro-channel.

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