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Auxiliary device

A technology of auxiliary device and cutting device, applied in fine working device, abrasive surface adjustment device, transportation and packaging, etc., can solve the problems that the operator must prepare, the trimming plate cannot bear the troublesome and other problems

Pending Publication Date: 2022-07-19
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the case of dressing to correct the cutting edge of the cutting tool, there is a problem that the operator has to prepare a dressing plate, which is troublesome.

Method used

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Examples

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Embodiment Construction

[0036] Hereinafter, an auxiliary device according to an embodiment of the present invention will be described with reference to the accompanying drawings.

[0037] refer to figure 1 For description, the auxiliary device indicated by the reference numeral 2 as a whole includes at least: a cutting tool storage unit 4 that stores a plurality of cutting tools; a carry-in unit 6 that carries out and carries cutting tools from the cutting tool storage unit 4; and a Y-axis direction positioning unit 8, which positions the carry-out and carry-in unit 6 relative to the cutting tool storage unit 4 at the action position and the retracted position in the Y-axis direction; the Z-axis moving mechanism 10, which moves the carry-out and carry-in unit 6 in the Z-axis direction; and the X-axis moving mechanism 12. It moves the carry-out and carry-in unit 6 in the X-axis direction to act on the cutting tool attached to the main shaft of the cutting unit of the cutting device. Also, the X-axis ...

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PUM

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Abstract

The invention provides an auxiliary device which can automatically carry a finishing plate to a cutting device. The auxiliary device connected with the cutting device is provided with a dressing plate accommodating part for accommodating a dressing plate for dressing a cutting tool; and a holding member that holds the dressing plate housed in the dressing plate housing portion, and the auxiliary device carries the dressing plate held by the holding member to a sub-table disposed adjacent to the chuck table.

Description

technical field [0001] The present invention relates to an auxiliary device connected to a cutting device. Background technique [0002] A wafer having a plurality of devices such as ICs and LSIs formed on its front surface is divided by a plurality of intersecting planned dividing lines and divided into individual device chips by a cutting device, and the divided device chips are used in electrical equipment such as mobile phones and personal computers. [0003] The cutting device includes: a chuck table having a holding surface for holding the wafer; a cutting unit to which a cutting tool for cutting the wafer held by the chuck table is mounted with a fixing nut; and an X-axis feed member that The chuck table performs machining feed along the X-axis direction; the Y-axis feed member, which indexes the cutting unit in the Y-axis direction perpendicular to the X-axis direction; and the Z-axis feed member, which feeds the cutting unit The dipping feed is performed in the Z-a...

Claims

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Application Information

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IPC IPC(8): B28D5/02B28D7/00B28D7/04H01L21/67H01L21/677
CPCB28D5/023B28D5/0058B28D5/0064B28D5/0082H01L21/67092H01L21/67742B24B53/12B24B27/06B24B41/06Y10T483/174
Inventor 寺师健太郎
Owner DISCO CORP