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Auxiliary device

A technology of auxiliary devices and cutting devices, used in devices for fixing grinding wheels, fine working devices, transportation and packaging, etc.

Pending Publication Date: 2022-07-19
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the case of trimming the end face of the mounting flange that supports the back of the cutting tool, there is a problem that the operator must prepare an end face correction jig, which is troublesome.

Method used

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Examples

Experimental program
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Effect test

Embodiment Construction

[0036] Hereinafter, an auxiliary device according to an embodiment of the present invention will be described with reference to the accompanying drawings.

[0037] refer to figure 1 For description, the auxiliary device indicated by the reference numeral 2 as a whole includes at least: a cutting tool storage unit 4 that stores a plurality of cutting tools; a carry-in unit 6 that carries out and carries cutting tools from the cutting tool storage unit 4; and a Y-axis direction positioning unit 8, which positions the carry-out and carry-in unit 6 relative to the cutting tool storage unit 4 at the action position and the retracted position in the Y-axis direction; the Z-axis moving mechanism 10, which moves the carry-out and carry-in unit 6 in the Z-axis direction; and the X-axis moving mechanism 12. It moves the carry-out and carry-in unit 6 in the X-axis direction to act on the cutting tool attached to the main shaft of the cutting unit of the cutting device. Also, the X-axis ...

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PUM

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Abstract

The invention provides an auxiliary device which can automatically carry an end face correction jig to a cutting device. The auxiliary device connected with the cutting device is provided with an end face correction jig accommodating part for accommodating an end face correction jig used for trimming the peripheral end face of a mounting flange, and the mounting flange is formed at the front end of a main shaft of the cutting unit and supports the back of a cutting tool; and a holding member that holds the end face correction jig housed in the end face correction jig housing portion, and the auxiliary device carries the end face correction jig held by the holding member to a sub-table disposed adjacent to the chuck table.

Description

technical field [0001] The present invention relates to an auxiliary device connected to a cutting device. Background technique [0002] A wafer having a plurality of devices such as ICs and LSIs formed on the front surface divided by the planned dividing lines is divided into individual device chips by a cutting device, and the divided device chips are used in electrical equipment such as mobile phones and personal computers. [0003] The cutting device includes: a chuck table having a holding surface for holding the wafer; a cutting unit to which a cutting tool for cutting the wafer held by the chuck table is mounted with a fixing nut; and an X-axis feed member that The chuck table performs machining feed along the X-axis direction; the Y-axis feed member, which indexes the cutting unit in the Y-axis direction perpendicular to the X-axis direction; and the Z-axis feed member, which feeds the cutting unit The dipping feed is performed in the Z-axis direction perpendicular ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/02B28D7/00B28D7/04H01L21/67H01L21/677
CPCB28D5/023B28D5/0058B28D5/0064B28D5/0082H01L21/67092H01L21/67742B24B45/00B24B41/06B24B27/06
Inventor 寺师健太郎
Owner DISCO CORP