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Electronic device and manufacturing method of sensor in electronic device

A technology of an electronic device and a manufacturing method, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, the use of wave/particle radiation devices to transmit sensing components, and the use of electrical devices, etc. Image, high cost issues

Pending Publication Date: 2022-07-26
INNOLUX CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

So far, MUTs are mostly based on passive matrix and fabricated on wafers, which cannot realize 3D array images, and need to integrate MUTs with external circuits through wafer bonding, which is costly and expensive. It is not easy to make a large-area MUT

Method used

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  • Electronic device and manufacturing method of sensor in electronic device
  • Electronic device and manufacturing method of sensor in electronic device
  • Electronic device and manufacturing method of sensor in electronic device

Examples

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Embodiment Construction

[0056] The following disclosure provides many different embodiments or examples for implementing different features of the present application. The following application description describes specific examples of various components and their arrangements to simplify the description. Of course, these specific examples are not intended to be limiting. For example, if an embodiment of the present application describes that a first characteristic part is formed on or above a second characteristic part, it means that it may include an embodiment in which the above-mentioned first characteristic part and the above-mentioned second characteristic part are in direct contact. Embodiments may be included in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0057] Additionally, when the terms "comprising" and / or "having" are used in this specification, they designate the presence of the sta...

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Abstract

The invention provides an electronic device, which comprises a plurality of sensor pixels, and each sensor pixel comprises an acoustic wave sensor; the demultiplexer is electrically connected with the sonic sensor; the driving wire is electrically connected to the sonic sensor; the switching line is electrically connected to the demultiplexer; the sound wave sensor is electrically connected with the demultiplexer, the reading line is electrically connected with the demultiplexer, the driving line is used for transmitting a driving signal to the sound wave sensor so as to emit sound waves, and the switching line is used for starting the demultiplexer so as to output a sensing signal received by the sound wave sensor to the reading line.

Description

technical field [0001] The present application relates to an electronic device, in particular to an acoustic wave sensor and a manufacturing method thereof. Background technique [0002] The core element of the acoustic wave sensing system is, for example, an ultrasonic transducer (micromachined ultrasonic transducer, MUT), which is one of the focuses of active development in the world at present. Up to now, MUTs are mostly passive-matrix-based and fabricated on wafers, which cannot realize three-dimensional array images, and need to integrate MUTs with external circuits by means of wafer bonding, which is costly and expensive. It is not easy to make a large-area MUT. Therefore, how to reduce costs and / or realize large-area fabrication is expected by the industry. SUMMARY OF THE INVENTION [0003] According to an embodiment of the present application, an electronic device is provided, including: a plurality of sensor pixels, each of the sensor pixels including: an acoust...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/48H01L41/04H01L41/113H01L41/22H10N30/01H10N30/30H10N30/80
CPCG01D5/48H10N30/802H10N30/30H10N30/01B06B1/0215G01H11/08B06B1/0207B06B2201/51B06B2201/55
Inventor 万玮琳刘侑宗杨蕙菁李淂裕
Owner INNOLUX CORP