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Packed piezoelectric device and its manufacture method and piezoelectric actuator

A piezoelectric device, lamination technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, piezoelectric/electrostrictive/magnetostrictive devices and other directions, which can solve the problems of reduced machining performance and damage to the laminated piezoelectric device 31

Inactive Publication Date: 2006-06-07
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, when such a structure is adopted, not only the laminated piezoelectric device 31 becomes large as a result of an increase in the thickness of the lower outer layer portion, but also the machinability is deteriorated because the slits 47 must be deeply cut. Greatly reduced
In addition, making the cracks from the thinner lower outer layer portion makes the laminated piezoelectric device 31 vulnerable to damage.

Method used

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  • Packed piezoelectric device and its manufacture method and piezoelectric actuator
  • Packed piezoelectric device and its manufacture method and piezoelectric actuator
  • Packed piezoelectric device and its manufacture method and piezoelectric actuator

Examples

Experimental program
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Embodiment Construction

[0046] A description is given below of various preferred embodiments with reference to the accompanying drawings.

[0047] figure 1 A and 1B are external perspective views of a laminated piezoelectric device of a preferred embodiment of the present invention. figure 2 is a horizontal cross-sectional view of the structure of the driving portion of the laminated piezoelectric device of this preferred embodiment. image 3 A and 3B are used figure 1 Perspective views of piezoelectric actuators made of laminated piezoelectric devices of A and 1B. Figure 4 is a horizontal sectional view showing the state in which the laminated piezoelectric device of this preferred embodiment is fixed to the support substrate. Figures 1 to 4 Reference numeral 1 in , denotes a laminated piezoelectric device, reference numeral 2 denotes a piezoelectric actuator, and reference numeral 3 denotes a cutout portion.

[0048] The entire structure of the piezoelectric actuator 2 and the laminated pi...

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PUM

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Abstract

A laminated piezoelectric device comprising a layered piezoelectric body having a driving-side external electrode and a connection-side external electrode arranged at one side of the layered piezoelectric body, wherein the piezoelectric body separated by a slit is provided. The layered piezoelectric body forms a plurality of actuator units, and the slit extends from the upper surface of the layered piezoelectric body to the lower surface thereof. A cutout portion is formed in one side of the layered piezoelectric body in which the drive-side external electrode and the connection-side external electrode are placed such that the cutout portion is substantially parallel to the plurality of drive internal electrodes and connection internal electrodes. The width of the cutout portion is such that the cutout portion can reach a position above the bottom end of the slit from the lower surface of the layered piezoelectric body, but cannot reach the driving internal electrodes.

Description

technical field [0001] The present invention relates to laminated piezoelectric devices and methods for their manufacture. Specifically, the present invention relates to a laminated piezoelectric device for manufacturing a piezoelectric actuator having a plurality of separately drivable actuating units, and a method for manufacturing the laminated piezoelectric device, and also relates to a piezoelectric actuator comprising Piezoelectric actuators for such laminated piezoelectric devices. Background technique [0002] The printheads in common inkjet printers are driven by piezoelectric actuators. An example of such a piezoelectric actuator is disclosed in Japanese Unexamined Patent Application Laid-Open No. Hei 11-320881. The external shape of the piezoelectric actuator described in this publication is as Figure 13 As shown, it includes a laminated piezoelectric device 31. [0003] The laminated piezoelectric device 31 includes a layered piezoelectric body 37 which is a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/083B41J2/14B41J2/16H01L41/22H01L41/293H01L41/335H02N2/04H05K3/34
CPCB41J2/14274B41J2/1612B41J2/1623B41J2/1632B41J2/1646H05K3/3442H10N30/872H10N30/501H10N30/063H10N30/073
Inventor 中谷宏
Owner MURATA MFG CO LTD