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Substrate stand-by device and subsbrate processor with said device

A technology of standby position and substrate, applied in the direction of conveyor, transportation and packaging, conveyor objects, etc., can solve problems such as increasing cost

Inactive Publication Date: 2006-11-15
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At this time, every time the shape of the transport frame of the substrate transport device is changed, the design and modification of the substrate processing device will increase the cost.

Method used

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  • Substrate stand-by device and subsbrate processor with said device
  • Substrate stand-by device and subsbrate processor with said device
  • Substrate stand-by device and subsbrate processor with said device

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0038] figure 1 It is a schematic plan view of the substrate standby device 100 according to the first embodiment of the present invention. figure 2 yes figure 1 A schematic front view of the substrate standby device 100 of . Below, refer to figure 1 and figure 2 The substrate standby device 100 will be described.

[0039] Here, three directions perpendicular to each other are referred to as a first direction X, a second direction Y, and a third direction Z. The third direction Z represents a vertically upward direction. The first direction X and the second direction Y form a horizontal plane.

[0040] In addition, a glass substrate refers to a glass substrate for a liquid crystal display, a glass substrate for a PDP (plasma display panel), a glass substrate for a photomask, and the like. Hereinafter, the glass substrate is simply referred to as a substrate.

[0041] Such as figure 1 and figure 2 As shown, the substrate standby device 100 includes a pair of rack s...

no. 2 Embodiment approach

[0078] Figure 11 and Figure 12 It is a schematic plan view of a substrate standby device 100a according to the second embodiment of the present invention. Below, refer to Figure 11 and Figure 12 , the substrate standby device 100a will be described.

[0079] In addition, in Figure 11 and Figure 12 in, omit figure 1 The illustration of the conveying roller 103 and the substrate supporting part 120 of the .

[0080] Figure 11 and Figure 12 The substrate standby device 100a and figure 1 The substrate standby apparatus 100 differs in the shape of the support portion 112a of the substrate standby support 110a. Such as Figure 11 and Figure 12 As shown, the bracket portion 112a is composed of a frame 117a extending in the second direction Y and two brackets 118a extending in the first direction X. Each bracket 118a is provided to extend in the first direction X from both ends of the frame 117a. Substrate support rods 111 are provided to extend in the third dir...

no. 3 Embodiment approach

[0087] Figure 13 and Figure 14 It is a schematic plan view of the substrate standby device 100b according to the third embodiment of the present invention. Below, refer to Figure 13 and Figure 14 , the substrate standby device 100b will be described.

[0088] In addition, in Figure 13 and Figure 14 in, omit figure 1 The illustration of the conveying roller 103 and the substrate supporting part 120 of the .

[0089] Figure 13 and Figure 14 The substrate standby device 100b and figure 1 The substrate standby apparatus 100 differs in the shape of the support portion 112b of the substrate standby support 110b. Such as Figure 13 and Figure 14 As shown, the bracket portion 112b is composed of a frame 117b extending in the second direction Y and three brackets 118b extending in the first direction X. Each bracket 118b is provided to extend in the first direction X from both end portions and the central portion of the frame 117b. Substrate support rods 111 are ...

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Abstract

PURPOSE: A substrate standby apparatus is provided to prevent a substrate from being warped by supporting the outside and the inside of the outermost location among the locations supported by a substrate standby apparatus. CONSTITUTION: A substrate standby unit(100) supports the lower surface of a glass substrate, installed in such a manner that the substrate standby unit can move forward or backward with respect to a standby position from the side direction of an advance or repeat path of a substrate transfer unit along the direction crossing the advance or repeat path. A substrate support unit(120) supports the lower surface of the glass substrate, installed in such a manner that the substrate support unit can vertically transfer between a position lower than the standby position and a position higher than the standby position. A control unit controls the substrate standby unit and the substrate support unit so as to perform a transfer of the glass substrate between the substrate transfer unit and the substrate standby unit and a transfer of the glass substrate between the substrate standby unit and the substrate support unit.

Description

technical field [0001] The present invention relates to a substrate waiting device for temporarily waiting a glass substrate and a substrate processing device having the same. Background technique [0002] Glass substrates such as glass substrates for liquid crystal display devices, glass substrates for photomasks, and glass substrates for optical discs are subjected to various treatments using substrate processing equipment. For example, in order to improve production efficiency, a substrate processing device is used in which a series of processes are separately modularized and multiple processing modules are integrated. [0003] In this substrate processing apparatus, a substrate standby device for temporarily holding a glass substrate is provided during transfer of glass substrates between processing modules (for example, refer to JP-A-10-154652 and JP-A-9-199460). ). [0004] The glass substrate is supplied into the substrate processing device by the substrate conveyin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H01L21/30H01L21/84H01L21/304H01L21/68G02F1/13B65G49/06B65G49/07H01L21/677
CPCB65G49/00B65G2249/00G02F1/1303H01L21/67745
Inventor 长田直之冈田尚久南茂树
Owner DAINIPPON SCREEN MTG CO LTD
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