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Vertical heat treatment device

A heat treatment device, vertical technology, applied in transportation and packaging, gaseous chemical plating, coating, etc., can solve the problems of poor operability, that is, poor maintainability, and cannot only replace heating elements, and achieve the effect of improving maintainability

Inactive Publication Date: 2007-04-04
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the above-mentioned vertical heat treatment apparatus, since the heating element and the heat insulating material are integrally formed, in the case of a failure such as a deterioration of the heating element or a disconnection, only the heating element cannot be replaced, and there is a problem that the entire heater must be replaced.
On the other hand, equipment equipped with a plurality of heating elements that can be individually replaced has also been proposed as a heater. However, in general, in a vertical heat treatment device, the maintenance is performed from the side of the casing that accommodates the heater. In the case of maintenance work such as replacement or maintenance of the heating element on the other side (opposite side) of the housing, there is a problem that the so-called operability, that is, the maintainability is very poor.

Method used

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Embodiment Construction

[0023] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a longitudinal sectional view showing a vertical heat treatment apparatus according to an embodiment of the present invention. Fig. 2 is a schematic cross-sectional view showing the configuration of a rotation support mechanism (rotation support assembly). FIG. 3 is an enlarged cross-sectional view showing the structure of the jack member, and FIG. 4 is a bottom view of the jack member. In FIG. 2 , the left half shows the fixed state of the heater, and the right half shows the state where the heater is held up by the jack member.

[0024] In Fig. 1, 1 is a vertical heat treatment apparatus, and this vertical heat treatment apparatus has a casing 11 forming a periphery, and an object to be processed, such as a semiconductor wafer W, is housed above the casing 11, and is set for implementing a prescribed treatment such as an oxidation treatment. The ve...

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Abstract

Vertical thermal treatment equipment capable of facilitating maintenance operation such as the replacement of a heater element and increasing a maintainability, comprising a treatment container (4) for storing a large number of treated bodies (W) for heat-treating, a tubular heater (6) covering the periphery of the treatment container (4), a heater installation part (7) for installing the heater (6), and a casing (11) for storing the heater (6) so that the heater (6) can be maintained from one side, the heater (6) further comprising a plurality of heater elements (31) installed so as to be individually replaced, the heater installation part (7) further comprising a rotation supporting mechanism (40) for rotatably supporting the heater.

Description

technical field [0001] The invention relates to a vertical heat treatment device. Background technique [0002] In the manufacture of semiconductor devices, there are processes of applying various heat treatments such as oxidation, diffusion, CVD, annealing, etc. on the object to be processed, such as semiconductor wafers, and it can be used as one of the heat treatment devices for performing these processes. Vertical heat treatment equipment for heat treatment of wafers. [0003] In this vertical heat treatment apparatus, a processing container for accommodating a plurality of wafers for heat treatment is provided, and a cylindrical heater covering the periphery of the processing container is provided. The traditional heater is composed of a heating element arranged on the inner periphery of a cylindrical heat insulating material. [0004] However, in the above-mentioned vertical heat treatment apparatus, since the heating element and the heat insulating material are inte...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/31H01L21/22H01L21/324C23C16/46B60B33/06B60B33/08H01L21/00H01L21/205
CPCC23C16/46H01L21/67109B60B33/08H01L21/22H01L21/31H01L21/324
Inventor 门部雅人中尾贤山贺健一
Owner TOKYO ELECTRON LTD