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Gray tone mask defect detecting method and defect detecting device

A technology of defect inspection and gray-tone masking, which is applied in the direction of optical testing for flaws/defects, originals for photomechanical processing, and photographic process of patterned surfaces, etc., which can solve problems such as non-detection

Inactive Publication Date: 2003-03-12
HOYA CORP
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  • Claims
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Problems solved by technology

Although the detection sensitivity becomes higher when the threshold is set low, it must be set to a level that does not detect suspected defects

Method used

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  • Gray tone mask defect detecting method and defect detecting device
  • Gray tone mask defect detecting method and defect detecting device
  • Gray tone mask defect detecting method and defect detecting device

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Embodiment Construction

[0045] Next, a defect inspection method and defect inspection device for a gray tone mask having a gray tone portion will be specifically described.

[0046] FIG. 1(1) shows a state where white defects 4 (pinholes) occur in the light-shielding portion 1, black defects 5 (spots) occur in the transmissive portion 2, and white defects 6 (pattern defects) occur in the gray tone portion 3. Arrows indicate the case of comparing scans of one lens (upper lens) of the inspection device.

[0047] Fig. 1(2) shows the transmission amount signal 7 obtained along the above-mentioned scanning line. The 7 levels of the transmittance signal are B in the shading part 1, W in the transmissive part 2, and G in the gray tone part 3, and the transmittance of the shading part 1 and the transmittance of the transmissive part 2 are set to 0% and 100% respectively . The transmittance signal 7 is basically composed of a graphic edge line signal (graphic shape signal) generated at the edge of the graph...

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Abstract

The present invention provides a defect inspection method and device for gray scale mask having a light-shielding part, light-transmitting part and gray scale part to proceed inspection once. The solution of the present invention is to use the comparison inspection technique, so as to mutually compare the same pattern in the mask for inspecting the defect; in addition to the critical value normally extracted from the light-shielding part and light-transmitting part, a critical value solely extracted from the gray scale part is newly designed. Also, it can distinguish that the inspected one belongs to which of the domain of the light-shielding part, light-transmitting part and gray scale part. If the inspected one belongs to one of the domain of the light-shielding part or light-transmitting part, the critical value normally extracted from the light-shielding part and light-transmitting part is used for inspecting the normal defect; If the inspected one belongs to the domain of gray scale part, the critical value normally extracted from the gray scale part is used for inspecting the gray scale part.

Description

field of invention [0001] The present invention relates to a defect inspection method, a defect inspection device, and the like of a gray tone mask. Background technique [0002] In recent years, in the field of masks for large LCDs, attempts have been made to reduce the number of masks using grayscale masks (Monthly FPT Intelligence, May 1999). [0003] Here, the gray tone mask has a light shielding portion 1, a transmission portion 2, and a gray tone portion 3 on a transparent substrate as shown in FIG. 4(1). The gray-tone part 3 is, for example, an area where a light-shielding pattern 3a within the resolution limit of an exposure machine for a large LCD is formed. to vary the thickness of the photoresist. 3b is a fine transmission part within the resolution limit of the exposure machine in the gray tone part 3 . Both the light-shielding portion 1 and the light-shielding portion pattern 3a are generally formed of films of the same thickness made of the same material suc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F1/00G03F1/84G06T7/00
CPCG06T2207/30148G03F1/84G03F1/144G06T7/0004G03F1/50
Inventor 中山宪治
Owner HOYA CORP
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