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Liquid material ejecting method, liquid material ejecting apparatus and use

A droplet ejection head, liquid technology, applied to the surface coating device, inking device, identification device, etc., can solve the problems of large size, uneven light transmission characteristics, and uneven light transmission

Inactive Publication Date: 2003-10-15
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For this reason, there is a problem that the obtained color filter tends to have non-uniform light transmission characteristics in the plane direction.
[0013] However, if the above-mentioned conventional color filter manufacturing method is used, it is found that there is such a problem that although the movement of the head is subtly set so that the amount of material given depends on the coloring place, the surrounding environmental conditions or material In the case of large changes in the type and viscosity, etc., it is not appropriate to control the movement of the head, etc.
[0014] Therefore, on the contrary, this situation will be found: between the colored part of the boundary part of the scanning area of ​​the color filter and the colored part outside the boundary part, the difference in the amount of material given is large, and the light transmission in the plane direction Transient inhomogeneity becomes larger

Method used

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  • Liquid material ejecting method, liquid material ejecting apparatus and use
  • Liquid material ejecting method, liquid material ejecting apparatus and use
  • Liquid material ejecting method, liquid material ejecting apparatus and use

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0097] Embodiment 1, such as figure 1 As shown, it is a method of ejecting a liquid substance using the droplet ejection head 22, which is characterized in that: while the droplet ejection head 22 or the substrate 2 is scanned in the longitudinal direction, a plurality of liquid objects are made to correspond to each The nozzle rows 27 of the nozzles sequentially discharge the substrate 2, and at the same time, the positions of the discharge start portion and the discharge end portion of the liquid, or either position are different.

[0098] Hereinafter, the discharge mechanism, the plurality of liquid substances, the substrate, and the discharge method constituting the first embodiment will be described in detail.

[0099] 1. Discharge mechanism and discharge method

[0100] (1) ejection mechanism

[0101] As the discharge mechanism used in Embodiment 1, for example, in the form of using a piezoelectric element, it is desirable to make a plurality of liquid substances, tha...

Embodiment approach 2

[0147] Second, see Figure 8 to Figure 15 Embodiment 2 of the present invention will be described. This embodiment is characterized in that a plurality of droplet discharge heads are arranged in a predetermined configuration and used as one droplet discharge unit. Generally, the shape, arrangement pattern, size (area), etc. of the film structure (planar pattern) that should be formed by ejection of liquid droplets vary depending on the use, type, form, etc. of the object of manufacture (substrate, etc.). However, in order to form such a dimensional structure, preparing a droplet discharge head corresponding to each manufacturing object also brings about an increase in manufacturing cost and also causes deterioration of manufacturing efficiency. Therefore, in this embodiment, a plurality of droplet ejection heads are arranged in a predetermined pattern and used integrally so that a nozzle array corresponding to the shape, arrangement pattern, size, etc. of the manufacturing ob...

Embodiment approach 3

[0175] Embodiment 3 is a kind of Figure 16 The device for ejecting a liquid from a liquid droplet ejection head as shown in the figure is characterized in that: a nozzle row is provided on the droplet ejection head for scanning the liquid droplet ejection head in the longitudinal direction. Or the substrate sequentially discharges a plurality of liquid substances, and the positions of the discharge start portion and the discharge end portion of the plurality of liquid substances, or either of them, are different.

[0176] Hereinafter, as the discharge device of the liquid material of the third embodiment, the description of the same content as that of the first embodiment will be appropriately omitted, and the difference will be mainly described.

[0177] 1. The way of ejection mechanism

[0178] In Embodiment 3, since the content of the same form as Embodiment 1 can also be made, description thereof will be omitted.

[0179] 2. Liquid

[0180] In Embodiment 3, since the c...

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Abstract

To provide a liquid material ejecting method and a liquid material ejecting apparatus, etc., in which uniform electro-optic characteristics, etc. are obtained in the planar direction. In the liquid material ejecting method and the liquid material ejecting apparatus, etc., a plurality of liquid materials are successively ejected toward a substrate from corresponding nozzle rows while relatively scanning a droplet ejection head or the substrate, and respective positions of ejection start and / or end points for the plurality of liquid materials are set different from each other. End portions of areas of the substrate, in which the plurality of liquid materials are applied, are thereby not or less overlapped with each other. Accordingly, with the liquid material ejecting method, variations in amount of the applied liquid materials in the planar direction can be reduced.

Description

technical field [0001] The present invention relates to a liquid ejection method, a liquid ejection device, a color filter manufacturing method, a color filter, a liquid crystal display device, an electroluminescent device manufacturing method, an electroluminescent device, and a plasma display panel Manufacturing method and plasma display. [0002] More specifically, the present invention relates to a method for discharging a liquid substance, a device for discharging a liquid substance, a method for manufacturing a color filter, a color filter, a liquid crystal A display device, a method for manufacturing an electroluminescent device, an electroluminescent device, a method for manufacturing a plasma display panel, and a plasma display. Background technique [0003] In recent years, electro-optic devices such as liquid crystal devices (hereinafter, sometimes called LCDs), electroluminescence devices (hereinafter, sometimes called EL devices) have been used in display parts...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20B05C5/00B05D1/26B41J2/14G02F1/1335G09F9/00H05B33/10H10K99/00
CPCH01L51/56H05B33/10H01L27/3244H01J2211/42H01L51/0005H01L51/5262B41J2/14032B41J2202/09H10K59/12H10K71/135H10K59/875B41J2/145H10K50/85H10K71/00
Inventor 川濑智己
Owner TOKYO ELECTRON LTD
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