Double-layer dielectric reflective space optical modulator with self-limiting micro-mechanical component

A spatial light modulator and medium technology, applied in optical components, instruments, optics, etc., can solve problems such as unwanted optical scattering, reduce device contrast ratio, easy plastic deformation, etc., achieve high-quality packaging methods, improve contrast ratio, and avoid costly manufacturing effect

Inactive Publication Date: 2005-09-28
REFLECTIVITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The downside of aluminum, however, is that it is prone to fatigue and plastic deformation, which can lead to long-term reliability issues and cell "memory", where vacant positions start to tilt towards their most frequently occupied positions
Another deficiencies of this DMD include: 1) In the current design, a large ripple (caused by the mirror support post) is displayed at the center of the mirror, which causes scattering of incident light and reduces light efficiency
Films including this structure would be roughened, but this leads to unwanted optical scattering, reducing the contrast ratio of the device

Method used

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  • Double-layer dielectric reflective space optical modulator with self-limiting micro-mechanical component
  • Double-layer dielectric reflective space optical modulator with self-limiting micro-mechanical component
  • Double-layer dielectric reflective space optical modulator with self-limiting micro-mechanical component

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Embodiment Construction

[0080] The description refers to several figures which contain reference numerals. The same reference numbers in different figures indicate similar or identical parts.

[0081] In this specification, the words "optical" and "light" are used. In the specification and claims, "optical" means a frequency related to electromagnetic frequencies, not just in the visible light domain. For example, an "optically transmissive medium" is one that transmits electromagnetic waves at an operating frequency, whether or not that frequency is in the visible range.

[0082] An angled top perspective view of one embodiment of a micromechanical spatial light modulator 10 (hereinafter "SLM") of the present invention is shown in FIG. 1 . Figure 1. An enlarged view of the SLM10 is shown in the Figure 13 middle. SLM 10 may include pixels of any configuration and array size. However, for clarity, only four cells 12, 12a, 12b and 12c in a 2x2 grid configuration are shown in the figure. The pict...

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Abstract

The spatial light modulator includes one upper optical transparent medium, one lower medium with addressing circuit, and one or more electrostatic deflecting elements hinged to the upper medium. During operation, the lens is optionally deflected to modify the spatial light incident to the upper medium and the light through the upper medium is reflected. The motion limiting pin is fixed to the reflective deflecting element to avoid the lens to impact to the lower medium. The motion limiting pin pushes against the upper medium so as to limit the deflection angle of the reflective deflecting element.

Description

[0001] This application is a divisional application of Chinese patent application 988142236 filed on September 24, 1998, entitled: "Double Dielectric Reflective Spatial Light Modulator with Self-Limiting Micromechanical Elements". technical field [0002] The present invention relates to spatial light modulators, particularly spatial light modulators with electronically addressable deflectable elements mounted on an optically transmissive medium. Background technique [0003] A spatial light modulator (SLM) is a transducer that modulates an incident beam of light corresponding to an optical or electrical input in a spatial pattern. Incident light can be modulated in phase, intensity, polarization or direction. This modulation can be achieved by using various materials that are optomagnetic, optoelectronic, or elastic. SLMs have many applications, including display systems, optical information processing, optical data storage, and printing. [0004] A common technique for a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/00G02B26/08
Inventor A·G·休博斯
Owner REFLECTIVITY
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