Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane

a manufacturing process and spray device technology, applied in metal-working devices, microelectromechanical systems, coatings, etc., can solve the problems of not enabling a high reproducibility of nozzles and a particularly complex manufacturing process

Inactive Publication Date: 2010-06-24
STMICROELECTRONICS SRL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Various membranes of nozzles for inhalers have been proposed; however, some of these require a particularly complex manufacturing process, whilst others do not enable a high reproducibility of the nozzles.

Method used

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  • Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane
  • Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane
  • Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane

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Embodiment Construction

[0019]As is shown in FIG. 1, according to one embodiment of the present disclosure, a wafer 10 is provided, comprising a substrate 11 made, for example, of silicon of an N type having a thickness of between 400 μm and 725 μm, preferably 400 μm. A sacrificial layer 12 is then laid, made, for example, of silicon oxide, which has a thickness of between 0.6 μm and 1.5 μm, preferably 0.8 μm.

[0020]Next (FIG. 2), grown on the wafer 10 is a membrane layer 13, preferably made of non-doped polysilicon. Alternatively, the membrane layer 13 may be made of deposited material, compatible with silicon processing technology (e.g., deposited polysilicon). Providing a membrane layer 13 made of grown or deposited material (thus differing from the substrate in either material and / or crystalline structure) has the advantage that the choice of the material to be used may be tuned according to the particular application of the membrane layer 13. In fact, by varying the material of the membrane layer 13, t...

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Abstract

A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.

Description

BACKGROUND[0001]1. Technical Field[0002]The present disclosure relates to a process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device, and to the spray device that uses such membrane, in particular a spray or aerosol device of an inhaler used for administration of pharmaceutical products, parapharmaceutical products, or perfumes.[0003]2. Description of the Related Art[0004]For example, in applications in the medical field, inhalers of a known type are generally used for administering medicaments in controlled doses or for a wide range of aerosol-based therapies.[0005]An inhaler supplies the medicament, which is in liquid form, as a nebulized dispersion of drops. Preferably, an inhaler is of contained dimensions and generally operated with a battery so that the patient is able to carry it with him and use it in a discrete way.[0006]Inhalers of a known type, for example, of the type described in U.S. Pat. No. 6,196,219, generally comprise a memb...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): A61M11/08B23P17/00A61M15/00B05B17/00
CPCB05B1/14B05B17/0638A61M15/009B05D7/00B81B2201/058Y10T29/49401B81B2203/0127B81C1/00087
Inventor MERASSI, ANGELO ANTONIOPESCI, ANGELOVIGNA, BENEDETTOGALEAZZI, ERNESTINOMANTOVANI, MARCO
Owner STMICROELECTRONICS SRL
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