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Statistical Illuminator

a technology of statistically illuminating and illuminating plate, which is applied in the direction of photomechanical equipment, process and machine control, instruments, etc., can solve the problem of intricate process of stamping, and achieve the effect of extending the duty cycle and reducing the frequency of component replacemen

Inactive Publication Date: 2010-09-09
MICRONIC LASER SYST AB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The technology described in this patent is about an illumination source that uses multiple laser diodes. The invention detects when one or more of the laser diodes fails and compensates for it by adjusting the power of the remaining laser diodes to restore the illumination to its previous level. This helps to extend the life of the laser diodes and reduce the frequency of replacement. The technology can be particularly useful in cases of catastrophic failure."

Problems solved by technology

Printing with stamps is an intricate process that typically overlaps multiple writing passes.
Illuminators are a major part of the operating cost of many microlithographic printing systems.

Method used

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  • Statistical Illuminator
  • Statistical Illuminator
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Examples

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Embodiment Construction

[0016]The following detailed description is made with reference to the figures. Preferred embodiments are described to illustrate the technology disclosed, not to limit its scope, which is defined by the claims. Those of ordinary skill in the art will recognize a variety of equivalent variations on the description that follows.

[0017]The technology disclosed uses a one or two dimensional array of laser diodes with individually controlled power feeds and radiation outputs as an illumination source. Based on our analysis, we believe that 15 laser diodes is a good minimum number to permit the system to continue operation after catastrophic failure of one or more laser diodes, while continuing to satisfy a selected coherence function and afford a printing fidelity. Our analysis demonstrates that seven or eight laser diodes is too few to permit reduction of output from one of the remaining good laser diodes, to reestablish symmetry. By catastrophic failure, we mean that one or more laser ...

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PUM

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Abstract

The technology disclosed relates to an illumination source including numerous laser diodes. In particular, it relates to extending the duty cycle and / or reducing the frequency of component replacement by detecting failure of one or more individual laser diodes and compensating for the failure, without replacing the laser diodes.The technology disclosed can be used in cases of catastrophic laser diode failure by changing the power of remaining laser diodes to restore illumination to the coherence function similar to the pre-failure illumination field. Particular aspects of the technology disclosed are described in the claims, specification and drawings.

Description

RELATED APPLICATION[0001]This application claims the benefit of U.S. Provisional Application No. 61 / 158,310, filed 6 Mar. 2009, which is hereby incorporated by reference.[0002]This application is related to US patent application entitled “Rotor Imaging System and Method with Variable-Rate Pixel Clock”; and US patent application entitled “Variable Overlap Method and Device for Stitching Together Lithographic Stripes”; and US patent application entitled “Lithographic Printing System with Placement Corrections”, all filed contemporaneously. The related applications are incorporated by reference.BACKGROUND OF THE INVENTION[0003]The technology disclosed relates to an illumination source including numerous laser diodes. In particular, it relates to extending the duty cycle and / or reducing the frequency of component replacement by detecting failure of one or more individual laser diodes and compensating for the failure, without replacing the laser diodes.[0004]The Micronic Laser developmen...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H05B37/02
CPCG03F7/70291G03F7/70366G03F7/70516G03F7/70508G03F7/70783G03F7/70433G01B11/303G03F7/70591
Inventor LUBEREK, JAREKSANDSTROM, TORBJORN
Owner MICRONIC LASER SYST AB