Methodology for improving device performance prediction from effects of active area corner rounding

Abstract

A system and method for modeling a semiconductor transistor device structure having a conductive line feature of a designed length connected to a gate of a transistor device in a circuit to be modeled, the transistor including an active device (RX) area over which the gate is formed and over which the conductive line feature extends. The method includes providing an analytical model representation including a function for modeling a lithographic flare effect impacting the active device area width; and, from the modeling function, relating an effective change in active device area width (deltaW adder) as a function of a distance from a defined edge of the RX area. Then, transistor model parameter values in a transistor compact model for the device are updated to include deltaW adder values to be added to a built-in deltaW value. A netlist used in a simulation includes the deltaW adder values to more accurately describe the characteristics of the transistor device being modeled including modeling of lithographic corner rounding effect on transistor device parametrics.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a novel method and system for optimizing integrated circuit layouts, generally, and particularly, a system and method for modeling performance of a semiconductor device structure for achieving modified ground rules for lithographic feature distances that optimize semiconductor device performance.[0003]2. Description of the Prior Art[0004]Lithographic constraints are important factors in determining the efficiency of a circuit layout. In essence, lithographic constraints are conventionally determined by the generally limited capability of a lithographic process to successfully print line features at specified positions within tolerances. A lithographic process involves using a lithographic exposure tool to illuminate a lithographic mask from a range of directions, and focusing a projected image of the mask onto a photosensitive film that coats a partially fabricated integrated circuit on ...

AI Technical Summary

Benefits of technology

[0013]The present invention provides a system and method that addresses the above and other issues by providing a computationally efficient technique that accurately accounts for the shrinking or increase of the size of device features in semiconductor devices.

Problems solved by technology

In essence, lithographic constraints are conventionally determined by the generally limited capability of a lithographic process to successfully print line features at specified positions within tolerances.

Thus, in the migration to 45 nm CMOS fabrication processes, e.g., of the device structures shown in FIGS. 1A, 1B, there is a need for a ground rules at a point where device performance is negatively affected.