Micro sensor for detecting hepatic fibrosis based on method of antibody and antigen
A technology of micro-sensors and liver fibrosis, which is applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems of cross-contamination test results, high cost, unreliability, etc., to facilitate mass production, improve accuracy, reduce The effect of measurement error
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[0020] The present invention is further described below by way of examples.
[0021] The microsensor is manufactured by the lift-off method after evaporation (the counter electrode also uses a gold electrode). It can also be prepared by sputtering instead of evaporation, and corrosion instead of lift-off.
[0022] a. Clean the silicon wafer with No. 1 and No. 2 solutions in turn, rinse with deionized water, and dry.
[0023] b. Thermal growth of 300nm SiO 2 .
[0024] c. Photoetching the required working electrode and counter electrode patterns, as shown in Figure 1 and Figure 2. There are 6 working electrodes 3 arranged symmetrically on both sides, with a diameter of 1mm and a spacing of 200 microns.
[0025] d. Evaporate a titanium layer with a thickness of about 20nm, followed by evaporation of gold with a thickness of 300nm.
[0026] e.lift-off to get the required working electrode and counter electrode pattern.
[0027] f. Photoetching the required reference electro...
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